A kind of thin film transistor and array substrate

A technology of thin-film transistors and ohmic contact layers, which is applied in the direction of transistors, semiconductor devices, and electric solid-state devices, can solve the problems of increasing the difficulty of the array substrate process and reducing the production efficiency of the array substrate, and achieve the effect of reducing leakage current

Active Publication Date: 2019-02-12
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this solution increases the difficulty of manufacturing the array substrate and reduces the production efficiency of the array substrate

Method used

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  • A kind of thin film transistor and array substrate
  • A kind of thin film transistor and array substrate
  • A kind of thin film transistor and array substrate

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Embodiment Construction

[0031] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings and examples, so as to fully understand and implement the process of how to apply technical means to solve technical problems and achieve technical effects in the present invention. It should be noted that, as long as there is no conflict, each embodiment and each feature in each embodiment of the present invention can be combined with each other, and the formed technical solutions are all within the protection scope of the present invention.

[0032] figure 1 A schematic structural diagram of an existing thin film transistor is shown.

[0033] Such as figure 1 As shown, the existing thin film transistor includes: a glass substrate 101 , a gate 102 , a gate insulating layer 103 , an active layer 104 , an ohmic contact layer 105 and a source / drain 106 . Wherein, the gate 102 is formed on the glass substrate 101 , and its constituent material is co...

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Abstract

A thin film transistor and an array substrate. The thin film transistor comprises: a gate electrode (202); a gate electrode insulation layer (203) formed on the gate electrode and covering the gate electrode; an active layer (204) formed on the gate electrode insulation layer; a first material layer (205) formed on the active layer; and a source / drain electrode (206) formed on the first material layer. The first material layer comprises: a first ohmic contact layer (205a), a second ohmic contact layer (205c) and a high impedance interlayer (205b). The high impedance interlayer is formed between the first ohmic contact layer and the second ohmic contact layer, and an impedance thereof is greater than impedances of the first ohmic contact layer and the second ohmic contact layer. By means of the thin film transistor, a leakage current existing between a source / drain electrode and an active layer can be effectively reduced, and the manufacturing process therefor is simple.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a thin film transistor and an array substrate. Background technique [0002] With the development of Flat Panel Display (FPD for short) technology, people have higher and higher requirements for display resolution and frame refresh rate, so the development of new materials and new processes is imminent. [0003] At present, in the field of Thin Film Transistor-Liquid Crystal Display (TFT-LCD for short), aluminum and molybdenum are the main metal materials of the conductive layer. The advantages of aluminum and molybdenum are that the film forming process is simple, the adhesion and flatness are good, the softness is not easy to cause climbing breakage, and it is not easy to spread to cause film pollution. Aluminum is the ideal conductive metal material of choice for small size and low resolution display panels. [0004] However, the resistivity of aluminum is relativel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/786H01L29/45H01L27/12
CPCH01L29/45H01L29/786
Inventor 孙涛
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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