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Preparation method of TiAlSi/TiAlSiN multilayer alternating coating with high abrasion resistance

A wear-resistant and coating technology, applied in the field of preparation of TiAlSiN coatings, can solve problems such as poor wear resistance of TiAlSiN coatings, and achieve the effects of improving wear resistance, increasing service life, and improving industrial applicability

Active Publication Date: 2019-06-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the technical problem of poor wear resistance of the existing TiAlSiN coating, and provides a preparation method of a TiAlSi / TiAlSiN multilayer alternating coating with high wear resistance

Method used

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  • Preparation method of TiAlSi/TiAlSiN multilayer alternating coating with high abrasion resistance
  • Preparation method of TiAlSi/TiAlSiN multilayer alternating coating with high abrasion resistance
  • Preparation method of TiAlSi/TiAlSiN multilayer alternating coating with high abrasion resistance

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specific Embodiment approach 1

[0023] Specific Embodiment 1: This embodiment is a method for preparing a TiAlSi / TiAlSiN multi-layer alternating coating with high wear resistance, which is specifically carried out according to the following steps:

[0024] 1. Clean the substrate and install the substrate: use YG8 hard alloy as the coating substrate, polish the surface of the substrate to a mirror surface, and then use acetone and alcohol to ultrasonically clean the substrate for 10-15 minutes respectively; select plasma immersion ion implantation and deposition equipment as the coating equipment, the plasma immersion ion implantation and deposition equipment is provided with a 45 ° magnetic filter elbow and an arc source system; the substrate after cleaning is installed on the target stage of the plasma implantation and deposition equipment, and is facing the 45 ° At the outlet of the magnetic filtering elbow, the TiAlSi alloy cathode target is installed in the arc source system;

[0025] 2. Sputtering clean...

specific Embodiment approach 2

[0030] Embodiment 2: This embodiment differs from Embodiment 1 in that: in step 1, the surface of the substrate is polished to a mirror surface, and then the substrate is ultrasonically cleaned with acetone and alcohol for 10 minutes respectively. Others are the same as the first embodiment.

specific Embodiment approach 3

[0031]Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the TiAlSi alloy cathode target described in step 1 is prepared by water-cooled copper crucible melting equipment. Others are the same as those in Embodiment 1 or 2.

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Abstract

The invention discloses a preparation method of a TiAlSi / TiAlSiN multilayer alternating coating with high abrasion resistance, and relates to a preparation method of a TiAlSiN coating. The technical problem of poor abrasion resistance of existing TiAlSiN coating is solved. The preparation method of the TiAlSi / TiAlSiN multilayer alternating coating adopts a TiAlSi alloy cathode target, coating compositions are changed by changing introduced nitrogen gas, thus, the multilayer alternating coating is prepared, and the coating industry applicability is improved. Due to the low hardness of TiAlSi alloy and the high hardness of a TiAlSiN coating, the soft and hard alternating coating prepared through the method can relieve the coating stress, the plastic toughness of the coating is improved, theabrasion resistance of the coating is improved, and the method has great significance for prolonging the service life of the tool coating.

Description

technical field [0001] The invention relates to a preparation method of TiAlSiN coating. Background technique [0002] As a cemented carbide coating, TiAlSiN coating has important application prospects in the field of hard coatings because of its high hardness and high wear resistance. It can significantly improve the service life and cutting ability of coated tools, and greatly improve the industrial Production efficiency, promote the development process of the manufacturing industry. However, the high hardness of the coating makes its own toughness poor, and its bonding performance with the base material is also relatively poor. It is prone to wear and tear during processing and manufacturing, and its wear resistance is poor, thus affecting the service life of the tool. Wear resistance is an important performance index of tool coating materials, and improving the wear resistance of coatings plays a vital role in improving the applicability of coatings. [0003] The commo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/34C23C14/54
Inventor 王浪平赵凡王小峰
Owner HARBIN INST OF TECH
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