Quasi-shear mode multi-layer co-firing piezoelectric actuator and multi-layer co-firing preparation method thereof

Abstract

The invention discloses a quasi-shear mode multi-layer co-firing piezoelectric actuator and a preparation method thereof. The actuator comprises four driving units arranged in a 2*2 matrix; all driving units comprise multilayer piezoelectric ceramic structures with internal electrodes and are in alternating positive and negative polarization along the thickness direction; the direction of the electric field applied by each driving unit is parallel or anti-parallel to the polarization direction; the multilayer piezoelectric ceramic sheets with the internal electrodes in the driving units are connected in parallel on a circuit; the driving units are divided into four d31 mode driving units or four d33 mode drive units according to the electrodes; the bottom is fixedly connected with a fixation seat; and the upper surface is a displacement output end. d36, d35 and d34 quasi-shear mode multi-layer co-firing piezoelectric actuator can be applied to precision positioning related fields suchas precision manufacturing, machining and driving. The method provided by the invention realizes miniaturization, precision and low-cost batch preparation of the device, and can improve the temperature and structural stability of the function of the device.

Description

technical field [0001] The invention relates to precision actuation and positioning technology, in particular to a multi-layer structure shear or "quasi-shear" mode piezoelectric actuator, and a preparation method for the multi-layer structure actuator, in particular to a multi-layer co-firing preparation method . Background technique [0002] Piezoelectric actuator is a precision actuation and execution element that uses the inverse piezoelectric effect to generate force and displacement output. Piezoelectric actuators can generate longitudinal micro-displacement, lateral bending or shear micro-displacement and actuation when a voltage is applied. Piezoelectric actuators have the advantages of small size, high displacement accuracy, fast response, and low noise, and are widely used in optical platforms, optical communications, aerospace, semiconductor micro-nano processing, and other precision drive fields. [0003] Piezoelectric actuators are further divided into resonan...

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Problems solved by technology

[0006] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a multilayer co-fired, quasi-shear mode piezoelectric actuator and a preparation method thereof. This novel quasi-shear mode multilayer structure piezoelectric actuator, wherein The polarization direction of each piezoelectric ceramic sheet is consistent with the direction of the applied electric field, and can be prepared by a very mature tape-casting multilayer co-firing method, thus solving the current shear piezoelectric actuator (d 15 Mode thickness shear type multilayer piezoelectric actuator) can not be prepared by multi-layer co-fired technical bottlenecks, improve the temperature stability and structural stability of the shear type piezoelectric actuator, reduce the pressure caused by the adhesive interface creep aging, hysteresis and interface displacement loss, and lay the foundation for the multi-layer co-firing of multi-degree-of-freedom actuators in the future

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