Quasi-shear mode multilayer co-fired piezoelectric actuator and its preparation method

Abstract

The invention discloses a quasi-shear mode multilayer co-fired piezoelectric actuator and a preparation method thereof, including four driving units arranged in a 2×2 matrix; the driving units are all multilayer piezoelectric ceramic structures containing internal electrodes , are alternately positive and negative polarization along the thickness direction; the direction of the electric field applied by each driving unit is parallel or anti-parallel to the polarization direction; the multilayer piezoelectric ceramic sheets containing internal electrodes in the driving unit are connected in parallel on the circuit; according to the electrode divided into four d 31 pattern drive unit or four d 33 Mode drive unit; the bottom is fixedly connected with the fixed base, and the upper surface is the displacement output end; including: d 36 、d 35 and d 34 The quasi-shear mode multilayer co-fired piezoelectric actuator can be applied to precision positioning related fields such as precision manufacturing, processing, and driving. The method of the invention realizes the miniaturization, precision, and low-cost batch preparation of devices, and can improve the temperature and structural stability of device functions.

Description

technical field [0001] The present invention relates to precision actuation and positioning technology, in particular to a shear or "quasi-shear" mode piezoelectric actuator with a multilayer structure, and a preparation method for the multilayer structure actuator, especially a multilayer co-firing preparation method . Background technique [0002] Piezoelectric actuator is a precision action and actuator that uses the inverse piezoelectric effect to generate force and displacement output. Piezoelectric actuators can produce longitudinal micro-displacement, transverse bending or shear micro-displacement and drive when voltage is applied. Piezoelectric actuators have the advantages of small size, high displacement accuracy, fast response, and low noise, and are widely used in optical platforms, optical communications, aerospace, semiconductor micro-nano processing, and other precision drive fields. [0003] Piezoelectric actuators are further divided into resonant piezoele...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a multilayer co-fired, quasi-shear mode piezoelectric actuator and a preparation method thereof. This novel quasi-shear mode multilayer structure piezoelectric actuator, wherein The polarization direction of each piezoelectric ceramic sheet is consistent with the direction of the applied electric field, and can be prepared by a very mature tape-casting multilayer co-firing method, thus solving the current shear piezoelectric actuator (d 15 Mode thickness shear type multilayer piezoelectric actuator) can not be prepared by multi-layer co-fired technical bottlenecks, improve the temperature stability and structural stability of the shear type piezoelectric actuator, reduce the pressure caused by the adhesive interface creep aging, hysteresis and interface displacement loss, and lay the foundation for the multi-layer co-firing of multi-degree-of-freedom actuators in the future

Images