Groove-type transient voltage suppressor and manufacturing method thereof

Abstract

The invention discloses a groove-type transient voltage suppressor and a manufacturing method thereof. According to the manufacturing method, a first substrate of a first conduction type and a secondsubstrate of a second conduction type are etched and heated to form a bonding semiconductor structure, the bonding semiconductor structure comprises at least three binding semiconductor columns, conduction types of two adjacent semiconductor columns are opposite, the semiconductor columns comprise first connecting columns, second connecting columns and interval columns, the first connecting columns are used for connecting with first metal layers, the second connecting columns are used for connecting with second metal layers, and the interval columns are positioned among the first connecting columns and the second connecting columns. The groove-type transient voltage suppressor at least comprises two serially connected and abutted diodes, so that a bi-directional protection function is achieved. A PN knot interface shortcoming of the bonding semiconductor structure is less, so that electric leakage of the groove-type transient voltage suppressor is low, and the protective characteristics and the reliability of the groove-type transient voltage suppressor are effectively improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a trench type transient voltage suppressor and a manufacturing method thereof. Background technique [0002] Electro-Static Discharge (ESD) and other random transient voltages in the form of voltage surges usually exist in various electronic devices. Voltage surges ranging from electrostatic discharge to lightning can induce transient current spikes. As semiconductor devices are increasingly miniaturized, high-density, and multi-functional, electronic devices are increasingly vulnerable to voltage surges, which can even cause fatal injuries. [0003] A transient voltage suppressor (TransientVoltage Suppressor, TVS), as a diode-based protection device, is usually used to protect sensitive circuits from various forms of transient high voltage impacts. Based on different applications, the transient voltage suppressor can protect the circuit by changing the surge discharge p...

AI Technical Summary

Problems solved by technology

The commonly used trench-type transient voltage suppressors can only achieve unidirectional protection. If bidirectional protection is required, multiple transient voltage suppressors need to be connected in series or in parallel, but this will increase the device area and manufacturing cost.

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