Resolution test card for Nano CT imaging quality detection and preparation method of resolution test card

Abstract

The invention discloses a preparation method of a resolution test card for Nano CT imaging quality detection and belongs to the technical fields of nanometer materials and CT imaging. The method comprises the steps that a base body is preprocessed, and the preprocessed base body is acquired; the preprocessed base body is placed on a sample table inside a helium ion microscope, a gallium ion beam current generated by a gallium ion source in the helium ion microscope is utilized to perform etching on the preprocessed base body, and etched stripes are acquired; and width calibration is performedon the etched stripes, and the resolution test card is acquired. The invention furthermore provides the resolution test card prepared through the method for Nano CT imaging quality detection. The preparation method has the advantages that control is easy, the process is simple, the cycle is short, efficiency is high, and cost is low; and the prepared resolution test card for Nano-CT imaging quality detection is uniform in stripe width and large in depth ratio.

Description

technical field [0001] The invention belongs to the technical field of nanomaterials and CT imaging, and relates to a resolution test card for quality detection of Nano CT imaging and a preparation method thereof. Background technique [0002] Nano CT is a new imaging device with higher resolution developed on the basis of Micro CT, which improves the spatial resolution of X-ray imaging to the nanometer level, and is widely used in many fields such as biological imaging, pathological detection and integrated circuit detection. There are broad application prospects. The imaging quality of Nano CT generally uses a resolution test card, which can objectively describe the image resolution, and intuitively and simply reflect the image resolution performance index. However, with the improvement of the resolution of Nano CT, the processing of the resolution test chart is difficult and costly, especially when the system resolution is high, it is difficult to realize the ideal point...

AI Technical Summary

Problems solved by technology

Micromachining can only achieve micron details by mechanical means; the size of LIGA processing can reach the micro-nano scale, but the cost of LIGA processing is relatively high; ion beam processing can reach the micro-nano scale, but the aspect ratio cannot be too large; laser The processing speed is fast and the precision is high, but it is difficult to achieve nanoscale

At present, the spatial resolution test cards of X-ray imaging in the market are provided by foreign companies such as German QRM Company, American Phantomlab Company and JIMA (Japan Inspection Instrument Manufacturers Association), and there is no corresponding domestic literature to provide technical support.

In addition, with the development of Nano CT, the spatial resolution test cards provided by foreign countries for Nano CT imaging cannot meet the application of specific occasions, need to be customized, and are expensive

At present, the common method of preparing resolution test cards for Nano-CT imaging quality inspection is micro-nano processing technology, but these methods have disadvantages such as complicated preparation process, long cycle time and low efficiency.

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