A reconfigurable field effect transistor with asymmetric structure
A field effect transistor, asymmetric technology, applied in the field of reconfigurable field effect transistors, can solve the problem of device on-state current weakening and other problems, achieve steep sub-threshold swing, control leakage current, and improve the current switching ratio.
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[0017] See attached Figure 1 to Figure 3 , the present invention consists of a source electrode 3 and a drain electrode 4 arranged at both ends of the channel 1, as well as a control gate 5, a polarity gate 6 and a sidewall 7 respectively arranged on one side of the source electrode 3 and the drain 4 to form an asymmetrical The reconfigurable field effect transistor of the type structure, the channel 1 between the polar gate 6 and the drain 4 is an under-overlapping region 8 provided with a spacer 7; the channel 1 is a carbon nanotube, Graphene tube or silicon nanowire material; the source electrode 3 and the drain electrode 4 are electrodes formed by nickel silicide or nickel disilicide deposited on the outer layer of the channel 1; the control gate 5 and the polarity gate 6 is the electrode formed by the photolithography of the gate oxide dielectric layer 2 deposited on the outer layer of the channel 1; the sidewall 7 is the silicon nitride, silicon dioxide or low-K dielect...
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