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Porous silicon-based tungsten oxide film composite material gas sensitive sensor and preparation method and application thereof

A thin-film composite material and gas sensor technology, which is applied in the field of gas sensors, can solve the problems of gas response/recovery performance, poor selectivity and stability of porous silicon gas sensors, and the inability of porous silicon to have high gas sensitivity and limitations. The effect of good response/recovery performance, good selectivity and repeatability, and high sensitivity

Inactive Publication Date: 2018-12-11
TIANJIN NORMAL UNIVERSITY
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Problems solved by technology

However, due to the difficulty in satisfying the coexistence of high porosity and pore order, porous silicon cannot have both high gas sensitivity and excellent gas response / recovery performance, and the gas selectivity and stability of porous silicon are poor. Practical application of silicon gas sensor

Method used

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  • Porous silicon-based tungsten oxide film composite material gas sensitive sensor and preparation method and application thereof
  • Porous silicon-based tungsten oxide film composite material gas sensitive sensor and preparation method and application thereof
  • Porous silicon-based tungsten oxide film composite material gas sensitive sensor and preparation method and application thereof

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Embodiment Construction

[0046] The technical solutions of the present invention will be further described below in conjunction with specific embodiments. It should be noted that: the following examples are illustrative, not limiting, and cannot limit the protection scope of the present invention with the following examples.

[0047] The raw materials used in the present invention are commercially available chemically pure reagents. The silicon wafer is a Prime-grade 4-inch single-sided polished p-type silicon wafer provided by Suzhou Jingsi Electronic Technology Co., Ltd., with a crystal orientation of , a resistivity of 9-10Ω·cm, and a thickness of 500 μm. The ultra-high vacuum target magnetron sputtering apparatus is a DPS-III ultra-high vacuum target magnetron sputtering coating machine manufactured by Shenyang Scientific Instrument Development Center Co., Ltd., and the muffle furnace model is SX2-2.5-10A.

[0048] The porous silicon-based tungsten oxide film composite gas sensor prepared by the ...

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Abstract

The invention discloses a porous silicon-based tungsten oxide film composite material gas sensitive sensor and a preparation method and an application thereof. The porous silicon-based tungsten oxidefilm composite material gas sensitive sensor is composed of a porous silicon substrate, a Pt film electrode, a porous silicon-based tungsten oxide sensitive layer and a Pt electrode formed thereon. The porous silicon-based tungsten oxide sensitive layer is composed of a porous silicon layer and a tungsten oxide (WO3) film deposited thereon by constant potential electrodeposition. By preparing a ohmic contact electrode on the porous silicon substrate and growing WO3 particle film in situ on porous silicon by means of an electrochemical method, the method is relatively simple, the needed controlprocess conditions are relatively few, and the cost is low; the prepared porous silicon-based tungsten oxide film composite material gas sensitive sensor can detect low concentration nitrogen dioxidegas at room temperature and has the characteristics of being relatively high in sensitivity, relatively good in responding / recovering property and good in selectivity and repeatability.

Description

technical field [0001] The invention belongs to the field of gas sensors, in particular to a porous silicon-based tungsten oxide film composite gas sensor for detecting nitrogen dioxide gas at room temperature and its preparation method and application. Background technique [0002] The rapid development of modern industry has brought great convenience, but also brought environmental pollution problems. As a major problem in environmental pollution, air pollution has attracted widespread attention from all walks of life. The number of pollutants entering the atmosphere every year is amazing and various. There are more than one hundred kinds that have been found to be obviously harmful or have attracted people's attention. Among them, nitrogen-containing compounds, sulfur-containing compounds, suspended particulate matter (SPM), carbon oxides, hydrocarbons, Photochemical oxidants, etc. [0003] Atmospheric nitrogen dioxide (NO 2 ) gas mainly comes from pollution sources suc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/127
Inventor 严达利刘士余竺云曹猛
Owner TIANJIN NORMAL UNIVERSITY
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