Silicon material recovery cleaning method and device

Abstract

The invention discloses a silicon material recovery cleaning method. The method comprises the step that pure water used during post-treatment is recycled for pre-treatment. By means of the characteristic that the requirement for the cleanliness of the pretreatment water is low, cleaning water used for post-treatment is recycled for cleaning silicon materials during pretreatment, accordingly, the requirement for the cleanliness of pretreatment can be met, and the purposes that the water consumption amount is reduced, the water resources are saved, and the cost is reduced can be achieved. The invention further discloses a silicon material recovery cleaning device.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a silicon material recycling and cleaning method and device. Background technique [0002] High-purity silicon is the most basic raw material in the semiconductor industry and the photovoltaic industry, and it accounts for a relatively high cost in the industry. Especially in the photovoltaic industry, high-purity silicon accounts for about 20% of the total cost. Therefore, in order to save costs, It is necessary to recycle the high-purity silicon scrap generated in the production process. [0003] During production, high-purity polycrystalline silicon is first made into crystal ingots, that is, single crystal crystal ingots or polycrystalline crystal ingots are produced by pulling single crystals or ingot polycrystalline silicon. Each crystal ingot uses only the core part in the middle. The surrounding silicon materials are recycled and used as raw materials...

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Problems solved by technology

[0003] During production, high-purity polycrystalline silicon is first made into crystal ingots, that is, single crystal crystal ingots or polycrystalline crystal ingots are produced by pulling single crystals or ingot polycrystalline silicon. Each crystal ingot uses only the core part in the middle. The surrounding silicon materials are recycled and used as raw materials for production and use again. When recycling the surrounding silicon materials, it is necessary to carry out pre-treatment and post-treatment on the surrounding silicon materials. Among them, the pre-treatment is mainly used to remove surface impurities, oil stains, etc., and the post-treatment is mainly for multiple Washing with pure water to meet the cleanliness requirements. At present, in the process of processing, each cleaning process in the pre-treatment and post-treatment is supplied with pure water separately. The water consumption and discharge are relatively large, and the waste of water resources is serious.

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