A method for removing the cap layer in the preparation of SIC nanostructures by anodic oxidation

A nanostructure and anodizing technology, applied in the field of materials, can solve the problems of reduced pore openness, existence of cap layer structure, functional application obstacles, etc., to achieve the effect of improving openness, improving performance, and shortening etching time

Active Publication Date: 2019-07-12
NINGBO UNIVERSITY OF TECHNOLOGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, although there have been many reports on the preparation of SiC nanoporous structure materials based on the anodic oxidation method, the top of the SiC nanoporous structure prepared according to this process always has a cap layer structure.
The cap layer covers a uniform pore structure, which greatly reduces the openness of the pores and creates a great obstacle to its functional application, which needs to be removed urgently

Method used

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  • A method for removing the cap layer in the preparation of SIC nanostructures by anodic oxidation
  • A method for removing the cap layer in the preparation of SIC nanostructures by anodic oxidation
  • A method for removing the cap layer in the preparation of SIC nanostructures by anodic oxidation

Examples

Experimental program
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Effect test

Embodiment 1

[0035] Weigh 13g NH 4 HF 2 Dissolve the powder in 20mL deionized water, and make it saturated with NH 4 HF 2 solution.

[0036] The etching solution is prepared by mixing hydrofluoric acid, ethanol and hydrogen peroxide solution in a volume ratio of 3:6:1.

[0037] Cut the industrial-grade SiC wafer into small pieces with a size of 0.7×1.5 cm, and ultrasonically clean them in alcohol and deionized water for 10 min respectively, and place the cleaned SiC wafer in an ethanol solution containing HF acid (the volume ratio of HF to ethanol is 2: 1) soak for 2 minutes, take it out and dry it in a 40°C oven for 10 minutes.

[0038] Clamp the cleaned and dried 4H-SiC wafer on the motor clamp, connect the positive electrode of the pulse power supply, as the anode of the experiment, connect the carbon plate to the negative electrode of the pulse power supply, and use it as the cathode of the experiment, set the constant current mode of the pulse power supply, and the current density...

Embodiment 2

[0042] The difference from Example 1 is that the etching solution in Example 2 is prepared by mixing hydrofluoric acid, ethanol and hydrogen peroxide in a volume ratio of 6:6:1, and the others are the same as in Example 1, and will not be repeated here. stated. The SEM figure of the SiC nanostructure that this embodiment makes is Figure 4 As shown, it shows that the prepared SiC nanostructure is a SiC nanopore structure with completely open pores, and there is no cap layer structure on the surface. Further, the cap layer caused by the original anodic oxidation is removed in this embodiment, and this embodiment engraved No new cap layer is formed during the erosion process.

Embodiment 3

[0044] The difference from Example 1 is that the etching solution in this example is prepared by mixing hydrofluoric acid, ethanol and hydrogen peroxide solution in a volume ratio of 2:6:1, and the others are the same as in Example 1, and will not be repeated here. .

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Abstract

The invention relates to a method for removing cap layer in a SiC nanostructure prepared by anodization, which belongs to the technical field of a material. The method comprises a step of pre-etchingwith a saturated NH4HF solution before etching by an etching solution taking a SiC wafer as an anode. The method can effectively remove the cap layer produced in the process of preparing the SiC nanostructure prepared by anodization, has simple and controllable process, and has good repeatability, the method is simple, the cap layer automatically falls off, no external force is required, and the removal efficiency is high. The method for removing the cap layer also reduces the morphology of a top surface of the SiC nanostructure obtained by anodization, openness is improved, and the performance of SiC nanostructure is increased. In addition, the method of removing the cap layer requires no additional equipment, and shortens the etching time and reduces the cost.

Description

technical field [0001] The invention relates to a method for removing a cap layer in the process of preparing nanometer materials by anodic oxidation, and belongs to the field of material technology. Background technique [0002] Silicon carbide (SiC) is a third-generation semiconductor with wide bandgap, high thermal conductivity, and high electron mobility. It has excellent mechanical properties, breakdown field strength, and radiation resistance, as well as unique high thermal conductivity and electron affinity. This makes them widely used in the fields of electronics and short-wave optics, especially in harsh environments such as high temperature / high pressure / chemical. At present, the preparation method of SiC porous structure with high specific surface area has attracted people's attention, and the prepared SiC porous structure has been widely used in sensors, optoelectronics and other fields. [0003] At present, the preparation of SiC porous structure by anodic oxid...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25F3/12C25D11/02B82Y40/00
CPCB82Y40/00C25D11/02C25F3/12
Inventor 陈善亮李维俊刘乔杨为佑
Owner NINGBO UNIVERSITY OF TECHNOLOGY
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