A kind of preparation method of multiferroic heterojunction film

A thin film preparation, ferromagnetic thin film technology, applied in the field of multiferroic heterojunction thin film preparation, can solve the problems of high control field strength and weak electric control magnetic effect

Inactive Publication Date: 2019-08-20
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the current research on multiferroic heterojunction structures, there are generally shortcomings such as weak electromagnetic effect and high field strength required for control. Therefore, a new preparation method for heterojunction thin films is developed to obtain strong electromagnetic effect and low response field. wait becomes urgent

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] The steps are:

[0035] 1) Film preparation

[0036] Composite Fe thin film on PMN-PT substrate by pulsed laser deposition method to obtain ferromagnetic / ferroelectric heterojunction thin film;

[0037] 2) Interface control

[0038] Put the ferromagnetic / ferroelectric heterojunction film prepared in step 1) into a heat treatment furnace, pass ammonia gas and hydrogen gas at a constant rate, and perform nitriding treatment at 150°C for 48 hours; cool down and cool to room temperature with the furnace, take out the sample;

[0039] The structure of the PMN-PT substrate is not affected during the heat treatment process, but nitrogen atoms will be infiltrated into the Fe film, which will cause the lattice expansion and generate stress at the interface.

Embodiment 2

[0041] The steps are:

[0042] 1) Film preparation

[0043] Composite Co thin film on BFO substrate by magnetron sputtering method to obtain ferromagnetic / ferroelectric heterojunction thin film;

[0044] 2) Interface control

[0045] Put the ferromagnetic / ferroelectric heterojunction film prepared in step 1) into a heat treatment furnace, pass ammonia gas and hydrogen gas at a constant rate, and perform nitriding treatment at 200°C for 40 hours; cool down and cool to room temperature with the furnace, take out the sample;

[0046] The structure of the BFO substrate is not affected during the heat treatment, while the nitrogen atoms will be infiltrated into the Co thin film, causing the lattice expansion and generating stress at the interface.

Embodiment 3

[0048] The steps are:

[0049] 1) Film preparation

[0050] Composite Ni films on PZT substrates by molecular beam epitaxy to obtain ferromagnetic / ferroelectric heterojunction films;

[0051] 2) Interface control

[0052] Put the ferromagnetic / ferroelectric heterojunction film prepared in step 1) into a heat treatment furnace, pass ammonia gas and hydrogen gas at a constant rate, and perform nitriding treatment at 250°C for 36 hours; cool down and cool to room temperature with the furnace, take out the sample;

[0053] The structure of the PZT substrate is not affected during the heat treatment process, while nitrogen atoms will be infiltrated into the Ni film, causing the lattice to expand and generate stress at the interface.

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PUM

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Abstract

A preparation method of a multi-ferric heterojunction thin film is characterized by comprising the steps of 1) combining a ferromagnetic thin film on a stable-structure ferroelectric thin film substrate by methods such as pulse laser deposition, magnetron sputtering or molecular beam epitaxy during preparation of the thin film to obtain a ferromagnetic / ferroelectric heterojunction thin film, wherein the ferroelectric thin film substrate is one or PMN-PT, BFO, PZT, BTO, PTO and PZN-PT, and the ferromagnetic thin film is one of Fe, Co, Ni, CoFe, CoFeB, FeNi, FeSi, FeSiAl and FeAl; and 2) placingthe ferromagnetic / ferroelectric heterojunction thin film prepared in the step 1) in a heat treatment furnace by interface control, introducing a nitrogen-containing gas at a constant rate, performingnitrogen impregnation processing for 0.5-48 hours under a temperature of 150-600 DEG C, reducing a temperature, cooling with the furnace to a room temperature, and taking out a sample, wherein the stable-structure ferroelectric thin film is not affected during the heat treatment process, nitrogen atoms can be impregnated into the ferromagnetic thin film to generate a gap solid solution or a new phase, cause lattice expansion and generate stress at an interface, and the nitrogen-containing gas is one of nitrogen, ammonia, nitrogen and hydrogen and ammonia and hydrogen.

Description

technical field [0001] The invention relates to a preparation method of a multiferroic heterojunction thin film, belonging to the field of material preparation. Background technique [0002] With the rapid development of the information industry, people's requirements for information storage technology are getting higher and higher, so a lot of research has begun to focus on information storage devices with small size, high density, fast speed, low energy consumption and long life. However, the size of semiconductor transistors is about to reach the physical limit predicted by the theory of traditional semiconductor manufacturing technology, and it is difficult to greatly improve the performance of information storage devices. Therefore, if we want to make further breakthroughs in the field of information storage, we must find new materials or new theoretical methods. [0003] In the current information storage technology, Magnetic Random Access Memory (MRAM) uses a magneti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F41/14H01F41/20H01F41/18H01F41/30
Inventor 李静彭晓领杨艳婷徐靖才王攀峰金红晓金顶峰洪波王新庆葛洪良
Owner CHINA JILIANG UNIV
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