Efficient annular vacuum coating device for fuel cell metal bipolar plate

Abstract

The invention relates to an efficient annular vacuum coating device for a fuel cell metal bipolar plate. The efficient annular vacuum coating device comprises a vacuum chamber, an ion source, target materials, a workpiece frame, a workpiece frame transmission system, a vacuum system, an isolating system and an electronic control system. According to the efficient annular magnetron sputtering device, compared with an original circular cavity, the areas, irrelevant to coating, in the center of the chamber are omitted, the effective use volume ratio of coating is increased, the air pumping time is shortened, and the coating efficiency is improved; secondly, the opposite-target sputtering mode is adopted, a substrate does not rotate, the constant target-substrate distance is kept, and uniformity of coating is facilitated; at the same time, the distance between two targets is shortened, the round larger chamber can better form a closed magnetic field, and enhancement of film base binding force is facilitated; and at the same time, the annular chamber can be divided into a plurality of branch chamber bodies, the pair of target materials of the same type is mounted in each branch chamberbody, and multilayer composite coatings can be deposited on the substrate surface. Compared with the prior art, the coating efficiency is high, the film layer quality is good, the yield is high, and the great significance is achieved on industrialization of the fuel cell metal bipolar plate coatings.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a high-efficiency annular vacuum coating device for metal bipolar plates of fuel cells. Background technique [0002] In recent years, as fossil fuels tend to run out and energy sources are becoming more and more scarce, the development of new energy sources, such as nuclear energy, wind energy, and solar energy, is imminent. The proton exchange membrane fuel cell (PEMFC) can convert chemical energy into electrical energy, avoiding the problem of low energy conversion efficiency caused by the Carnot cycle, and its energy utilization efficiency is high, theoretically up to 80-90%. In addition, its product is water, which is non-polluting, clean and environmentally friendly, so it has become a research hotspot in recent years. The fuel cell bipolar plate is a very important part of the fuel cell, which accounts for 80% of the total volume of the fuel cell, 70% of the total mass, and ...

AI Technical Summary

Problems solved by technology

Chinese patent 200910135305.2 discloses a circular conveying system for continuous coating equipment. A lifting device and a return device are installed at the front end of the feeding area and the rear end of the discharging area. The disadvantage of this patent is that the transmission system is too complicated, and the complex system will inevitably bring Due to the large failure rate, it is impossible to guarantee the reliability of equipment for continuous coating

The equipment occupies a small area and volume, but the uniformity of its coating cannot be guaranteed

Patent 201510103282.2 discloses an automatic double-sided continuous winding magnetron sputtering coating production line for flexible substrates, which can realize continuous coating of multi-roll substrates and greatly improve the coating efficiency, but this invention is only suitable for the production of flexible substrate surface coatings. Layer sputter coating, not suitable for bimetallic plates of fuel cells

In summary, the existing patents do not mention the requirements for high efficiency and high yield brought about by the industrialization of fuel cell bipolar plates

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