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A kind of preparation method of ybco superconducting film for droplet-free microstrip antenna

A technology of microstrip antenna and superconducting film, applied in cable/conductor manufacturing, vacuum evaporation plating, coating, etc., can solve the problem of high droplet rate and achieve the effect of solving droplet and high uniformity

Active Publication Date: 2019-12-13
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problem of high droplet rate in the process of preparing YBCO superconducting film by existing nanosecond PLD technology, the purpose of the present invention is to provide a method for preparing YBCO superconducting film for microstrip antenna without droplet. The non-thermal effect of the interaction between femtosecond pulsed laser and the target material directly plasmas the target material and sprays it onto the substrate to deposit a YBCO film, realizing the preparation of a droplet-free YBCO film

Method used

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  • A kind of preparation method of ybco superconducting film for droplet-free microstrip antenna
  • A kind of preparation method of ybco superconducting film for droplet-free microstrip antenna
  • A kind of preparation method of ybco superconducting film for droplet-free microstrip antenna

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Embodiment 1

[0025] The specific preparation steps of YBCO superconducting film for droplet-free microstrip antenna are as follows:

[0026] Step 1. Fill oxygen into the femtosecond pulsed laser system and make the air pressure of oxygen be 15Pa, adjust the distance between the YBCO target material and the single-crystal MgO substrate of (100) crystal orientation to be 2.25cm, and the rotation speed of the single-crystal MgO substrate is set to 5 cycles / min, by adjusting the deflection mirror in the femtosecond pulse laser system, the scanning range of the femtosecond pulse laser on the YBCO target is 1.5cm×1.5cm; A femtosecond pulse laser with a width of 50 fs bombards the YBCO target, and deposits the bombarded material on a single crystal MgO substrate at a temperature of 550 ° C. After 3 hours of deposition, a YBCO deposition layer is obtained on the single crystal MgO substrate;

[0027] Step 2. Place the single crystal MgO substrate loaded with the YBCO deposition layer in an anneali...

Embodiment 2

[0031] The specific preparation steps of YBCO superconducting film for droplet-free microstrip antenna are as follows:

[0032] Step 1. Fill the femtosecond pulsed laser system with oxygen and make the oxygen pressure 20Pa, adjust the distance between the YBCO target and the (100) single crystal LAO substrate to be 2.25cm, and the rotation speed of the single crystal LAO substrate to be 7 cycle / min, by adjusting the deflection mirror in the femtosecond pulse laser system, the scanning range of the femtosecond pulse laser on the YBCO target is 1.5cm×1.5cm; The 120fs femtosecond pulsed laser bombards the YBCO target, and deposits the bombarded material on the single crystal LAO substrate at a temperature of 600°C. After 2 hours of deposition, the YBCO deposition layer is obtained on the single crystal LAO substrate;

[0033] Step 2. Place the single crystal LAO substrate loaded with the YBCO deposition layer in an annealing furnace filled with oxygen, and the oxygen pressure in ...

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Abstract

The invention relates to a preparation method of a YBCO superconducting film used for a globule-free microstrip antenna, and belongs to the technical field of surface engineering. According to the method, a non-thermal effect of the action of femtosecond pulse laser and a YBCO target material is used to directly make plasma from the YBCO target material, and the plasma is jetted to a substrate andis deposited to form a YBCO film. The globule phenomenon in a nanosecond pulse laser preparation process is prevented from the source, and a globule-free YBCO film is prepared. Through adjusting thedistance between the YBCO target material and the substrate, the scanning range of the femtosecond pulse laser on the YBCO target material, a substrate rotation speed, and parameters related to an annealing process, a YBCO superconducting film high in uniformity and c-axial crystal orientation is obtained. The YBCO superconducting film provides a good material base for application of a microstripantenna.

Description

technical field [0001] The invention relates to a YBCO (yttrium barium copper oxide, YBa 2 Cu 3 o 7 ) The method for preparing a superconducting film belongs to the technical field of surface engineering. Background technique [0002] The microstrip antenna is an antenna composed of a radiation patch on the surface of a dielectric substrate with a conductor ground plate. The microstrip antenna has the characteristics of small size, light weight, easy feeding, and easy conformal installation with the carrier. Communication has a wide range of application prospects. [0003] Microstrip antennas are generally made of metal-based materials, but the loss caused by the feed network is very serious, which greatly limits the application of microstrip antennas in satellite communications. High-temperature superconductor (HTS) has extremely low surface resistance, and the microstrip antenna made of it can obtain higher radiation efficiency and gain due to the greatly reduced condu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/58C23C14/08H01B13/00
Inventor 郭磊周晖曹生珠王兰喜
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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