Hyperbolic metamaterial composite grating-enhanced high-frequency quantum-dot single photon source
A compound grating and single photon source technology, applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problems of low light emission efficiency and light exit efficiency, and achieve the effect of improving photon generation rate and collection and utilization efficiency
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Embodiment 1
[0031] A visible single photon source with CdSe / ZnS shell colloidal quantum dots located on the surface of a hyperbolic metamaterial composite grating, as follows figure 1 As shown, wherein: the substrate 1 is a Si substrate; the dielectric film 21 in the one-dimensional periodic structure is Al 2 o 3 Dielectric film with a thickness of 10nm; the metal film or metal-like film 22 in a one-dimensional periodic structure is a metal Ag film with a thickness of 8 nm; 2 o 3 The dielectric thin film 21 and the metal Ag thin film 22 form a hyperbolic metamaterial, and the surface is Al 2 o 3 Dielectric film; the air gap 3 is annular, the line width is 125 nm, in Al 2 o 3 / Ag multilayer hyperbolic metamaterial is etched with a period of 250 nm to form a concentric ring grating; quantum dot 4 is a CdSe / ZnS shell colloidal quantum dot with a light emission wavelength of 500 nm, placed at the center of the hyperbolic metamaterial surface of the composite ring grating place.
[0032...
Embodiment 2
[0034] A near-infrared single-photon source with PbS colloidal quantum dots inside a hyperbolic metamaterial composite grating, such as image 3 As shown, wherein: the substrate 1 is a sapphire substrate; the dielectric film 21 in the one-dimensional periodic structure is a Si film with a thickness of 20 nm; the metal film or metal-like film 22 in the one-dimensional periodic structure is a metal-like AZO Thin film with a thickness of 20 nm; the air gap 3 is ring-shaped, and the line width is 387.5 nm. It is etched on the AZO / Si hyperbolic metamaterial with a period of 775 nm to form a concentric ring grating; the quantum dot 4 is PbS quantum dots, and the emission wavelength is 1550 nm, placed at the center of the ring grating surface in the Si thin film inside the AZO / Si multilayer hyperbolic metamaterial.
[0035] This structure produces a Purcell factor (Purcell factor) of 150 at the emission wavelength of 500 nm, that is, the spontaneous emission rate is enhanced by 150 t...
Embodiment 3
[0037] A hyperbolic metamaterial composite grating-enhanced self-assembled InAs quantum dot electrically pumped single-photon source, such as Figure 4 As shown, wherein: the substrate 1 is a GaAs substrate; the bottom of the substrate 1 is provided with SiO 2 Anti-reflection film 12 with a thickness of 150 nm; the dielectric film 21 in the one-dimensional periodic structure is TiO 2 A dielectric thin film with a thickness of 15 nm; the metal thin film or metal-like thin film 22 in the one-dimensional periodic structure is a metal Au thin film with a thickness of 15 nm; a ring grating is formed by etching on the pin structure GaAs thin film 51 with an air gap line width of 150 nm, the ring grating period is 450 nm, and spin-on-glass SOG 32 is filled in the gap groove of the ring grating; the quantum dot 4 is a self-assembled InAs quantum dot, and the light emission band is 900 nm; the pin structure GaAs thin film 51, the thickness is 300 nm; the GaAs lining An n-type electrod...
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