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Method for producing cubic zirconia layers

A zirconia and cubic technology, applied in the field of preparing zirconia layers, can solve the problems of difficulty in controlling the crystal structure of the synthesis layer, target poisoning, etc.

Inactive Publication Date: 2017-10-27
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0039] These problems also partly overlap with those arising in IBAD: target poisoning phenomena, layer composition (which also contains other material components), and difficulty in controlling the crystal structure of the resulting layer at low substrate temperatures of 200°C-600°C

Method used

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  • Method for producing cubic zirconia layers
  • Method for producing cubic zirconia layers
  • Method for producing cubic zirconia layers

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0156] Step (A)

[0157] First of all, the outside of the coating system is cleaned of the substrate on which the coating or layer system is to be applied. It depends on the substrate material and its production method. In most cases, wet chemical treatment, heat removal in a specific atmosphere or other methods known to those skilled in the art will be performed. In this case, wet chemical treatment is performed.

[0158] Step (B)

[0159] After placing the workpiece in the clamping device that provides this action and the holder in the vacuum processing device, the processing chamber is evacuated to a pressure of about 0.01 Pa.

[0160] Step (C)

[0161] Then, in a first vacuum pretreatment step, a radiant heater-assisted low-voltage arc plasma is between a cathode chamber with a hot cathode separated by a partition and the anode-connected workpiece in an argon-hydrogen atmosphere Ignition, wherein the method step is characterized by the following parameters:

[0162] ...

Embodiment 2

[0189] In another method variant, layers are now produced in which alloy targets produced by powder-metallurgy are used (in the example, 2 pieces at a time) with a composition of 85 at % Zr and as a typical stabilizer 15 at% yttrium (Y) to synthesize the functional layer (see also Table 2). For the production of intermediate or carrier layers, 2 elemental Zr targets are additionally used:

[0190] First, as described in Example 1, substeps (A)-(D) were repeated.

[0191] First, for comparison, layers without stabilizer were reproduced (steps E1 and F1). In this regard, the two Zr(85at%) / Y(15at%) targets were again replaced by two elemental Zr targets, i.e. 4 Zr targets were run to produce the interlayer.

[0192] Step (E2a)

[0193] This is done with the following parameters:

[0194]

[0195] Step (F2a)

[0196] Then a pure Zr-O layer (without Y) was deposited as a layer for which no Zr-Y target was used, i.e. 4 Zr targets were still run and as in example 1 only oxyge...

Embodiment approach

[0270] According to one embodiment, an advantage of the method of the invention is that the materials present separately will become alloyed with each other during operation in oxygen and in nitrogen-oxygen mixtures under the action of a spark moving on the target. Because the temperature at the bottom point of the spark can reach several thousand degrees Celsius, high melting point materials such as Zr can therefore be melted together with different concentrations of stabilizers, such as 1at%-25at% Y on the target surface just before being transformed into the gas phase molten.

[0271] Doing this method in argon will result in a lot of sputtering. These materials with different melting temperatures combine well with each other in oxygen or nitrogen-oxygen mixtures as reactive gases. The alloying process at the target surface provides greater freedom in the selection of starting materials for target production, since powders with an average particle size of 1 µm or lower to ...

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PUM

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Abstract

In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and / or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zirconium and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, it is also possible, combined with the use of the mixed target, to use nitrogen as the reactive gas in addition to oxygen.

Description

technical field [0001] This application is a divisional application of the invention application whose patent application number is 201080053523.2, the application date is September 24, 2010, and the title of the invention is "method for preparing cubic zirconia layer". [0002] The present invention relates to a method for producing a zirconium oxide layer as well as layers and / or layer systems containing zirconium oxide. The invention also relates to products with a layer of zirconia and their use. Background technique [0003] Zirconia-based layers are of interest primarily for their cubic and / or tetragonal form, for example in the field of fuel cell solid electrolyte applications. [0004] However, the ionic conductivity of zirconia-based layers and their thermal stability also enable their use in the field of sensors. [0005] Also in this field, preference is given to relying heavily on cubic crystal structures, as described in US20040084309: This document describes ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/08C23C14/32H01M8/1253
CPCC23C14/0021C23C14/0676C23C14/083C23C14/325H01M8/1253Y02E60/50C23C14/3485C23C14/0042C23C14/0036C23C14/24
Inventor J·拉姆B·维德里希
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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