Optical right-angle reflector and manufacture method thereof

Abstract

The invention provides an optical right-angle reflector and a manufacture method thereof. The method is used for manufacturing the optical right-angle reflector on a monocrystal silicon substrate, and comprises the steps of forming an etching mask on the surface of the substrate, wherein the etching mask comprises an opening for exposing the surface of the substrate, and the substrate is the monocrystal silicon substrate; wet etching the substrate with the etching mask to form an etched groove, wherein the etched groove at least comprises two side walls perpendicular to each other, the two side walls are silicon (110) crystal faces, and an included angle between each of the two side walls and the surface of the substrate is 45 degrees; and covering optical reflecting layers on the two side walls of the etched groove to form the right-angle reflector in the etched groove. The optical right-angle reflector manufactured according to the method provided by the invention is good in optical quality, high in precision, small in size and low in cost, a multi-groove right-angle reflector array can be conveniently manufactured, and thus the right-angle reflectors with large area can be acquired.

Description

technical field [0001] The present application relates to the fields of semiconductor technology and optical technology, and in particular to an optical right-angle mirror based on MEMS technology and a manufacturing method thereof. Background technique [0002] Optical mirrors are the most basic and widely used optical components / devices in optical technology. According to the law of light reflection, when the incident light is incident at a certain angle to the mirror surface, the outgoing angle of the reflected light is equal to the incident angle of the light. Therefore, when the light incident angle is not zero, the outgoing light and the incident light form a certain angle. Only when the light beam is perpendicular to the mirror surface, the light beam can return according to the original path. If the optical mirror shakes, vibrates, and reflects at any angle The beam will deviate, making it impossible to return on the same path. In some optical system applications, ...

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Problems solved by technology

Therefore, when the light incident angle is not zero, the outgoing light and the incident light form a certain angle, and only when the light beam is incident perpendicular to the mirror surface, the light beam can return according to the original path. The beam will deviate, and it will not be possible to return on the original path

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