Glass-based chip and manufacturing method thereof

Abstract

The invention relates to a glass-based microfluidic chip and a production method thereof. Microchannels are formed in the glass-based chip, wherein the microchannels include a plurality of first microchannels; the first microchannels are closed chambers; the production method comprises the following steps: acquiring a bottom glass sheet and a cover glass sheet; laminating the cover glass sheet onto the bottom glass sheet to form the microchannels so as to obtain a laminate; transferring the laminate to a heating device, and heating to the annealing temperature of the glass or above at a heating speed of 0.5-2 DEG C / min; and then annealing and cooling to obtain the glass-based chip. In allusion to the glass chip containing a closed microstructure, through reasonable regulation and control over the heating speed, trace water in the first microchannels can be uniformly vaporized and evaporated in the heating bonding process, so that the structures of the closed microchannels are ensured, the production time of the chip can be shortened, and the production efficiency can be improved.

Description

Technical field [0001] The invention relates to a microfluidic chip manufacturing technology, in particular to a glass-based chip and a manufacturing method thereof. Background technique [0002] Microfluidic chip is a science and technology whose main feature is the manipulation of fluids in micron-sized channels. It has the ability to reduce basic unit operations such as sample preparation, separation analysis, and detection in biological and chemical laboratories to a few square meters. The capacity on the centimeter chip is therefore also called the "micro total analysis system". Due to its high integration, low reagent consumption, fast analysis speed, and easy automation, microfluidic chips have been extensively studied by researchers, and commercial products have emerged in the fields of biology, medicine, and chemistry. [0003] The materials used to make microfluidic chips include glass, polymer materials, paper, etc. Among them, many universities and research institutes ...

AI Technical Summary

Problems solved by technology

However, using this method requires the production of a homogeneous chromium plate, which involves the purchase of expensive equipment

This not only makes the cost of processing glass-based microfluidic chips rise sharply, but also makes it difficult for some small companies and beginner researchers to have corresponding economic capabilities.

Although some people currently use laser ablation, powder bombardment, ultrasonic and other technologies to process microchannels on glass, the roughness of microchannels obtained by these mechanical processing methods is relatively large, which is difficult to meet the requirements of use.

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