Direct heating type millimeter wave signal detector based on silicon-based micromechanical cantilever beam T-shaped junction

Abstract

The invention relates to a direct heating type millimeter wave signal detector based on a silicon-based micromechanical cantilever beam T-shaped junction. The direct heating type millimeter wave signal detector is composed of a cantilever beam coupling structure, a T-shaped junction, a direct heating type microwave power sensor and a switch. The cantilever beam coupling structure comprises two groups of cantilever beams, each group of cantilever beams is composed of two symmetric cantilever beams, and the electric length of a CPW transmission line between the two cantilever beams at the central frequency 35GHz within a measured signal frequency range is lambda / 4. The power is detected by a first direct heating type microwave power sensor; the frequency is detected by the direct heating type microwave power sensor by measuring the synthetic power of two paths of coupling signals with a phase difference of 90 degrees at the central frequency; and the phase detection is realized by separately synthesizing the two paths of coupling signals with the phase difference of 90 degrees at the central frequency with two paths of equally divided reference signals, and detecting the synthetic power by suing the direct heating type microwave power sensor to obtain the phase of a to-be-detected signal.

Description

technical field [0001] The invention provides a direct heating millimeter-wave signal detector based on a silicon-based micromechanical cantilever beam T-junction, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] Electromagnetic waves with a length of 1 to 10 millimeters are called millimeter waves, which are in the higher microwave frequency band and have important research value in communication, radar, guidance, remote sensing technology, radio astronomy, clinical medicine and spectroscopy. Power, frequency and phase are the three major parameters of microwave signals, and their detection is an important part of electromagnetic measurement, which plays a key role in the application of microwave technology. Based on the continuous development and maturity of MEMS technology, many electronic components and mechanical components have been successfully miniaturized, and their performance is no less than that of tradi...

AI Technical Summary

Problems solved by technology

However, currently existing microwave signal detectors, including power detectors, frequency detectors and phase detectors, are relatively independent devices, and in microwave systems where power, phase and frequency need to be measured simultaneously, independent devices The size of the circuit is relatively large, and there are electromagnetic compatibility problems at the same time, so the research on the integrated detection system of millimeter wave signals has become the trend of future development.

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