Single-chip three-axis magnetic sensor

A magnetic sensor and three-axis magnetic technology, applied in the field of magnetic sensing, can solve the problems of unfavorable accurate measurement of three-dimensional magnetic fields, incomplete symmetry of triangular bulges, deviations, etc., to improve performance and yield, reduce production costs, and improve accuracy Effect

Inactive Publication Date: 2016-12-21
QST CORP
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AI Technical Summary

Problems solved by technology

However, due to the deviation of the process, the two waists of the trapezoidal or triangular protrusions are not completely symmetrical, resulting in the final calculation of the Y and Z axes are not orthogonal, but have a certain cross sensitivity between each other, which is very important for accurate measurement of the three-dimensional magnetic field is also unfavorable

Method used

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Embodiment 1

[0044] see Figure 4 , Figure 5 , The present invention discloses a single-chip three-axis magnetic sensor, which includes: an X-axis magnetic sensor 10 , a Y-axis magnetic sensor 20 , and a Z-axis magnetic sensor 30 .

[0045] The X-axis magnetic sensor 10 and the Y-axis magnetic sensor 20 are located in plane 1, and the Z-axis magnetic sensor 30 is designed through a Wheatstone bridge. The Z-axis magnetic sensor 30 includes four groups of Z-axis magnetoresistive sensing elements to form a Wheatstone bridge. bridge.

[0046] The Z-axis magnetoresistive sensing element includes a Z-axis magnetoresistive sensing unit 4 and a conductor unit 5; the Z-axis magnetoresistive sensing element is respectively arranged on both sides of the slope of the set inclination angle, and the Z-axis magnetoresistance sensor is changed simultaneously. The orientation angle of the conductor unit of the measuring element finally reaches the Z-axis magnetoresistive sensing element only measures th...

Embodiment 2

[0060] A single-chip three-axis magnetic sensor, the three-axis magnetic sensor includes: an X-axis magnetic sensor, a Y-axis magnetic sensor, and a Z-axis magnetic sensor.

[0061] The X-axis magnetic sensor and the Y-axis magnetic sensor are located in the plane, and the Z-axis magnetic sensor adjusts the Z-axis magnetic resistance at the same time through the Z-axis magnetoresistive sensing unit and the conductor unit arranged on both sides of the slope and the base plane connected to the slope. The initial magnetization direction of the sensing unit, the orientation of the conductor unit and the positions of the magnetoresistive sensing unit and the conductor unit on the slope achieve a Z-axis magnetic sensor that only senses the vertical magnetic field but not the horizontal magnetic field.

[0062] In summary, the single-chip three-axis magnetic sensor proposed by the present invention can improve measurement accuracy and reduce production costs.

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Abstract

The invention discloses a single-chip three-axis magnetic sensor. The three-axis magnetic sensor includes: an X-axis magnetic sensor, a Y-axis magnetic sensor, and a Z-axis magnetic sensor; the X-axis magnetic sensor and the Y-axis magnetic sensor are located in a plane , the Z-axis magnetic sensor adjusts the initial magnetization direction of the Z-axis magnetoresistive sensing unit, the orientation of the conductor unit and the magnetic The position of the resistive sensing unit and the conductor unit on the slope achieves a Z-axis magnetic sensor that only senses the magnetic field in the vertical direction but not the magnetic field in the horizontal direction. The single-chip three-axis magnetic sensor proposed by the invention can improve measurement accuracy and reduce production cost.

Description

technical field [0001] The invention belongs to the technical field of magnetic sensing, and relates to a three-axis magnetic sensor, in particular to a single-chip three-axis magnetic sensor. Background technique [0002] With the rapid development of consumer electronics and the continuous improvement of user experience requirements, more and more smartphones and tablet computers are equipped with electronic compasses as standard, which drives a large demand for magnetic sensors, especially three-axis magnetic sensors. [0003] At present, the magnetic sensors used in the electronic compass are mainly divided into the following categories based on the principle: Hall type, magnetoresistive type, and induction coil. Among them, magnetoresistive magnetic sensors include anisotropic magnetoresistive magnetic sensor (AMR), giant magnetoresistive magnetic sensor (GMR) and tunnel junction magnetoresistive magnetic sensor (TMR), which are all based on the principle of magnetoresi...

Claims

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Application Information

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IPC IPC(8): G01R33/09
CPCG01R33/091
Inventor 张开明杨鹤俊万虹
Owner QST CORP
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