Micro nano fiber vibration sensor based on hollow fiber
A vibration sensor, hollow-core fiber technology, applied in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc., can solve the problems of low reflectivity, expensive equipment, small size, etc., achieve small size, small cross-sensitivity, and improved The effect of sensitivity
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[0031] A micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, comprising: a single-mode optical fiber 1, a hollow-core optical fiber 2, and a solid-core optical fiber 3; wherein, the femtosecond laser ablates the solid-core optical fiber 3 to form a cantilever 4, and the solid-core The optical fiber 3 is used as a mass block;
[0032] The single-mode optical fiber 1, the hollow-core optical fiber 2 and the solid-core optical fiber 3 are sequentially fused; the hollow-core optical fiber 2 is ablated by a femtosecond laser to form a cantilever beam 4, and the solid-core optical fiber 3 is used as a mass block.
[0033] The length of the hollow-core fiber 2 is 1000 μm, the outer diameter is the same as that of the single-mode fiber 1, which is 125 μm, the inner diameter is 93 μm, and the femtosecond laser ablation depth is 90 μm; the length of the solid-core fiber 3 is 3000 μm.
[0034] processing methods:
[0035] Step 1, the single-mode fiber 1 ...
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