Preparation method of functional gradient multi-layer nano coating on surface of steel workpiece and product comprising functional gradient multi-layer nano coating
A functionally gradient, nano-multilayer technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problem of high equipment investment, limited popularization and application, low ionization rate of magnetron sputtering ion plating, etc. problems, to achieve the effect of simple structure production, scientific and reasonable design, and low process cost
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Embodiment 1
[0149] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance parts in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing; then put the cleaned workpieces into ethanol solution for dehydration After drying.
[0150] 2) Ion cleaning on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 1.0Pa; (2) Control the current of the Ta-HCD electron gun to 80A after arcing , keep the plasma arc of the Ta-HCD source directly irradiating the surface of the workpiece until the temperature in the vacuum chamber reaches 140°C; (3) Keep the vacuum degree in the reaction furnace at 1.0Pa, adjust the current of the Ta-HCD electron gun to 100A, and apply pulses to the workpiece The negative bias voltage is -140V; (4) Start two cathode ...
Embodiment 2
[0161] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance parts in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing; then put the cleaned workpieces into ethanol solution for dehydration After drying.
[0162] 2) Ion cleaning on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 1.0Pa; (2) Control the current of the Ta-HCD electron gun to 80A after arcing , keep the plasma arc of the Ta-HCD source directly irradiating the surface of the workpiece until the temperature in the vacuum chamber reaches 120°C; (3) Keep the vacuum degree in the reaction furnace at 1.0Pa, adjust the current of the Ta-HCD electron gun to 100A, and apply pulses to the workpiece The negative bias voltage is -100V; (4) Start two cathode ...
Embodiment 3
[0174] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance parts in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing; then put the cleaned workpieces into ethanol solution for dehydration After drying.
[0175] 2) Ion cleaning on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 1.0Pa; (2) Control the current of the Ta-HCD electron gun to 80A after arcing , keep the plasma arc of the Ta-HCD source directly irradiating the surface of the workpiece until the temperature in the vacuum chamber reaches 120°C; (3) Keep the vacuum degree in the reaction furnace at 1.0Pa, adjust the current of the Ta-HCD electron gun to 100A, and apply pulses to the workpiece The negative bias voltage is -100V; (4) Start two cathode ...
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