A Fully Symmetrical Decoupling Direct Output Frequency Vibration Gyroscope

Abstract

The invention relates to a holosymmetric decoupling vibrating gyroscope capable of directly outputting frequency. The gyroscope is characterized in that the mode of directly outputting frequency is adopted, signal loss is greatly reduced, and weak Coriolis effect frequency modulation is achieved; a holosymmetric structure is adopted, so that the resonant frequency of a driving mode and the resonant frequency of a detection mode are easy to match, meanwhile, damping matching of the two modes can be achieved, and drifting caused by process errors and changes of environment temperature can be reduced; a double-frame decoupling structure is adopted, quadrature errors can be reduced, and the signal-to-noise ratio of the gyroscope is increased; by the adoption of a differential motion resonance structure, sensitivity can be improved, and most types of common-mode interference can be restrained; by means of the planar scheme design, the vibrating gyroscope can adapt to wire cut electrical discharge machining or MEMS related processes easily and be miniaturized easily.

Description

technical field [0001] The invention relates to a direct output frequency vibration gyroscope, in particular to a fully symmetrical and decoupled direct output frequency vibration gyroscope structure, which belongs to the overall structure design direction in the field of resonant gyroscope design. Background technique [0002] In recent years, with the development of micro-mechanical technology, the manufacture of micro-mechanical gyroscopes with low cost, small size and good performance is becoming a research hotspot. In order to improve the performance of the micromechanical gyroscope, researchers have adopted a series of methods, such as designing a new structure, optimizing the control of the driving and detection circuits, matching the resonant frequency of the driving mode and the detection mode, and vacuum packaging. Although these methods can improve the sensitivity to a certain extent, the improvement will also bring some new problems. For example, when the resonan...

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Problems solved by technology

Although these methods can improve the sensitivity to a certain extent, the improvement will also bring some new problems. For example, when the resonance frequency of the driving mode and the detection mode are close, the mechanical coupling will cause the performance of the gyroscope to decline, especially if the process accuracy is not good. When the value is high, the process deviation makes the mechanical coupling more serious; although vacuum packaging can improve the quality factor of the gyro system, it increases the process difficulty and production cost, and also reduces the long-term working stability of the device.

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