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Direct frequency-output vibration gyroscope structure

A technology of output frequency, vibrating gyroscope, applied in the direction of gyro effect for speed measurement, gyroscope/steering induction equipment, piezoelectric effect/electrostrictive or magnetostrictive motor, etc., to improve sensitivity and measurement accuracy, suppress common The effect of mode interference and anti-interference ability enhancement

Inactive Publication Date: 2011-01-05
BEIHANG UNIV
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Problems solved by technology

Therefore, the accuracy of the resonant gyroscope using capacitance detection must be restricted by the bottleneck of weak capacitance detection.

Method used

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  • Direct frequency-output vibration gyroscope structure
  • Direct frequency-output vibration gyroscope structure
  • Direct frequency-output vibration gyroscope structure

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Abstract

The invention discloses a direct frequency output vibratory gyroscope structure, the aim is to design and manufacture a frequency modulation output vibratory gyroscope based on the plane manufacturing technology, so that the output signal anti-interference capability of the vibratory gyroscope is improved. The design of the vibratory gyroscope is characterized in that: (1) by adopting frequency local modulation means, the signal loss is greatly reduced, and the weak Coriolis effect localized frequency modulation is achieved; (2) by adopting a frame mass block supporting structure, the transverse Coriolis acceleration is correspondingly and significantly enlarged, which is effectively imposed on the axial direction of a resonator beam; (3) two resonator beams adopt a differential resonant structure, and a plurality types of the common-mode interferences can be inhibited, such as temperature stress; and (4) the plane project design is easy to adapt to the related technology of wire cutting machining or MEMS, and is easy to be miniaturized.

Description

A vibrating gyro structure with direct frequency output technical field The invention relates to a vibrating gyroscope structure, in particular to a vibrating gyroscope structure directly outputting frequency, which belongs to the overall structure design direction in the field of resonant gyroscope design. Background technique Various micromechanical vibration angular rate gyroscopes at home and abroad except Berkelay's RogerT.Howe (AshwinA.Seshia, RogerT.Howe, andStephenMontague: AnIntegratedMicroelectromechanicalResonantOutputGyroscope[J]. 15thIEEEMicroElectroMechanicalSystemsConference, 2002. (1): 20-24) developed the frequency output type Most of the frame angular rate gyroscopes use capacitance to detect the vibration of the resonant mass block, which is essentially vibration amplitude detection, which is inevitably restricted by the detection accuracy of weak capacitance. The capacitance level is generally 1-10pF, and the peak-to-peak value of the change is generall...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56B81B7/02G01C19/5656
Inventor 庄海涵樊尚春郭占社
Owner BEIHANG UNIV
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