Fully symmetrical decoupled accelerometer with direct output of frequency

Abstract

The invention discloses a fully symmetrical decoupled accelerometer with the direct output of a frequency. The accelerometer is totally symmetrically distributed as a whole. The accelerometer comprises a mass block (1), a first detecting elastic beam (2), a second detecting elastic beam (3), a third detecting elastic beam (4), a fourth detecting elastic beam (5), a first resonant tuning fork (6),a second resonant tuning fork (7) and an outer frame (8). The accelerometer is characterized in that (1) the direct output of a frequency is used, the signal loss is greatly reduced, and the detectionof a weak signal is achieved, (2) a fully symmetric decoupling structure is used, a quadrature error can be reduced, and the signal to noise ratio of the accelerometer can be improved, (3) a differential resonant structure is used, the sensitivity can be increased, and most types of common mode interference can be suppressed, and (4) plane plan design is employed, the accelerometer is easy to adapt to wire cutting or MEMS related processes, and the miniaturization is easy.

Description

technical field [0001] The invention relates to a direct output frequency accelerometer, in particular to a fully symmetrical and decoupled direct output frequency accelerometer structure, which belongs to the overall structure design direction in the field of resonant accelerometer design. Background technique [0002] In recent years, with the development of micro-mechanical technology, the manufacture of cheap, small-sized and good-performance micro-machined accelerometers is becoming a research hotspot. In order to improve the performance of micromachined accelerometers, researchers have adopted a series of methods such as designing new structures, optimizing control of driving and detection circuits, and vacuum packaging. Although these methods will improve the sensitivity to a certain extent, they will also bring some new problems, especially when the process accuracy is not high, the process deviation will make the mechanical coupling more serious; although vacuum pac...

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Problems solved by technology

Although these methods will improve the sensitivity to a certain extent, they will also bring some new problems, especially when the process accuracy is not high, the process deviation will make the mechanical coupling more serious; although vacuum packaging can improve the quality factor of the accelerometer system, but While increasing the process difficulty and production cost, it also reduces the long-term working stability of the device

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