Preparation method for carbon nanotube array cathode on Fe-based metal alloy substrate
A carbon nanotube array and alloy substrate technology, applied in the field of carbon nanotubes, can solve the problems of carbon nanotube growth termination, different catalyst particle sizes, uneven distribution, etc.
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[0026] The method for preparing a carbon nanotube array cathode on an iron-based metal alloy substrate of the present invention includes the following steps: Step 1. The iron-based metal alloy substrate used in the present invention is ultrasonically cleaned with acetone, absolute ethanol and deionized water 20-30min to remove surface organic pollutants and other impurities, and then blow dry with dry compressed nitrogen.
[0027] Step 2: Place the cleaned iron-based metal alloy substrate on the sample stage in the physical vapor deposition chamber, and use a combination of mechanical pump and turbo molecular pump to pump the chamber pressure to 10 -4 Pa, while introducing 40-50sccm argon gas, and using magnetron sputtering equipment under high bias conditions (200V) to deposit a layer of different element composition on the surface of iron-based metal alloy substrate by sputtering iron and chromium targets at the same time Thickness of the iron-chromium composite layer, and stop ...
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