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Diamond-like coating with insulating performance and preparing method

A technology of diamond coating and insulation performance, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problem of presenting semiconductor or even benign conductor state, low insulation resistance, which cannot meet the requirements of insulator DLC coating Performance requirements and other issues, to achieve the effect of solving thinner coating thickness, excellent insulation performance and wear resistance, and reducing internal stress

Inactive Publication Date: 2015-11-11
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Various DLC coatings prepared with metal doping (such as titanium, chromium, tungsten, etc.), DLC coatings without metal doping, and DLC coatings with multilayer structure design given in existing literature and patents have very low insulation resistance. Low, most of them are semiconducting or even benign conductors, which obviously cannot meet the working performance requirements of insulator (megaohm resistance) DLC coating

Method used

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Examples

Experimental program
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Effect test

preparation example Construction

[0029] The preparation method of the diamond-like coating with insulating properties of the present invention is: with high-purity C 2 h 2 As the carbon source in the DLC coating, it enters the vacuum furnace through three gas ion sources for plasma gas discharge. The three gas ion sources are placed on the inner wall of the furnace; high-purity Ar is used as the sputtering gas to ensure The surface of the substrate is effectively bombarded and cleaned by plasma; the ionized carbon particles are deposited on the surface of the substrate to form a diamond-like coating with insulating properties. The high purity C 2 h 2 The volume concentration is 99.999%. The preparation method specifically comprises the following steps:

[0030] 1) Prepare the matrix

[0031] Pretreating the substrate, placing the pretreated substrate on the sample stand of the ion beam assisted magnetron sputtering coating equipment;

[0032] The substrate of the present invention is any metallic substr...

Embodiment

[0043]This embodiment provides a method for preparing a wear-resistant, anti-friction and corrosion-resistant insulating DLC ​​coating on the surface of high-speed steel. It should be noted that the insulating DLC ​​coating prepared by the method of the present invention can be used on any parts It is carried out on the metal material and is not limited to this embodiment. The concrete preparation process of this embodiment is:

[0044] (1) A high-speed steel substrate (material: W18Cr4V) with a hardness of HRC=60 (material: W18Cr4V) quenched at 1170°C and tempered at 550°C was used as a sample. After surface degreasing and polishing, it was immersed in acetone for ultrasonic cleaning and alcohol dehydration.

[0045] (2) Put the pretreated sample into the ion beam assisted magnetron sputtering coating equipment, the coating equipment at least includes a vacuum chamber, a substrate sample stand, a substrate bias, an anode layer gas ion source, a gas supply system, Heater, vac...

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Abstract

The invention discloses a diamond-like coating with insulating performance and a preparing method. The diamond-like coating is a DLC coating with megohm-level insulating performance and is obtained by regulating and controlling the contents of Sp3 bonds and Sp2 bonds in the coating; the content of the Sp3 bonds is larger than 70%, and the content of the Sp2 bonds is smaller than 30%; the coating has the megohm-level insulating performance as well as the wear-resisting performance, the friction-reducing performance and the corrosion-resisting performance. According to the preparing method, in the DLC coating not doped with metal, the contents and the proportions of the Sp3 bonds and the Sp2 bonds in the coating are regulated and controlled through an innovative technical measure, and thus the DLC coating with the excellent megohm-level insulating performance is obtained.

Description

technical field [0001] The invention belongs to the field of coating materials and relates to the preparation of coating materials, in particular to a diamond-like coating with insulating properties and a preparation method. Background technique [0002] Diamond-like carbon coating (DiamondLikeCarbon, hereinafter referred to as DLC coating) is a metastable carbon material composed of Sp3 bond (diamond structure) and Sp2 bond (graphite structure), which has excellent wear resistance, friction reduction and corrosion resistance. The field of surface protection of molds and parts is being widely used. [0003] According to different practical application requirements, the composition and microstructure design and preparation methods of DLC coatings are different, and their performance will also vary greatly. At present, the surface coating protection of key parts in aviation, automobile, refrigeration, electronics, machinery, chemical industry and many other fields requires in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 马胜利
Owner XI AN JIAOTONG UNIV
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