Infrared super enhanced collection antenna based on electromagnetically induced transparency
An electromagnetic induction transparent and infrared super technology, applied in the field of infrared detection, can solve problems such as photodetector performance degradation, and achieve the effects of increasing photoconductive gain, improving collection efficiency, and improving response rate
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[0026] According to another aspect of the present invention, there is provided a method for preparing an infrared super-enhanced collection antenna based on electromagnetic induction transparency, comprising the following steps:
[0027] (1) Spin-coat negative photoresist on a substrate attached with a photosensitive material;
[0028] (2) Utilize an electron beam exposure machine to expose the negative photoresist, and make a sample based on electromagnetic induction transparent infrared super-enhanced collection antenna array and metal electrode pattern;
[0029] (3) developing the exposed sample;
[0030] (4) Use electron beam evaporation to deposit infrared super-enhanced collection antenna arrays and metal electrode materials based on electromagnetic induction transparency. The materials can be selected but not limited to nickel / titanium (adhesion layer) and gold / silver / copper / aluminum;
[0031] (5) After peeling off the photoresist, an infrared super-enhanced collection...
Embodiment 1
[0036] Such as image 3 As shown, the infrared super-enhanced collection antenna 3 based on electromagnetic induction transparency is an array of metal rods arranged periodically, wherein the horizontal direction is the x-axis direction, and the vertical direction is the y-axis direction. Each antenna unit in the array includes two kinds of resonant units, the first resonant unit 31 is placed along the y-axis, the second resonant unit 32 is two metal rods placed in parallel, and the first resonant unit 31 is placed in the second resonant unit 32. Between two metal rods, the direction is perpendicular to it. The antenna size is generally 1 / 10 to 1 / 5 of the design wavelength, so in the infrared band, the length L of the metal rod of the first resonant unit 1 and the metal rod length L of the second resonant unit 2 Range 0.5 micron ~ 5.0 micron, width w 1 and w 2 The range of P is 0.1 micron to 1.0 micron, and the range of P of the period is 0.6 micron to 5.5 micron. The mat...
Embodiment 2
[0039] Such as Figure 4 , the transparent infrared super-enhanced collection antenna 3 based on electromagnetic induction is an array of metal rods arranged periodically, wherein the horizontal direction is the x-axis direction, and the vertical direction is the y-axis direction. Each unit in the array includes two kinds of resonant units, the first resonant unit 31 is placed along the y-axis, the second resonant unit 32 is a metal rod placed along the x-axis, and the first resonant unit 31 is placed between the two second resonant units 32 , the direction is perpendicular thereto, and the first resonant unit 31 adjacent in the y direction is symmetrical to the center of the second resonant unit between them. The antenna size is generally 1 / 10 to 1 / 5 of the design wavelength. In the infrared band, the length L of the metal rod of the first resonant unit 1 and the metal rod length L of the second resonant unit 2 Range 0.5 micron ~ 5.0 micron, width w 1 and w 2 The range is...
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