GaAs-based pHEMT device and preparation method therefor
A device and barrier layer technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., to achieve the effect of low process difficulty and improved gate-to-drain breakdown voltage
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[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0021] see figure 1 , is a schematic cross-sectional view of a GaAs-based pHEMT device according to an embodiment of the present invention. The GaAs-based pHEMT device of this embodiment includes a GaAs substrate 10, a buffer layer 20, a first AlGaAs barrier layer 30, an InGaAs channel layer 40, a second AlGaAs barrier layer 50, and N + - GaAs layer 60 . The first AlGaAs barrier layer 30 and the InGaAs channel layer 40 form a two-dimensional electron gas 31 ...
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