Fe-Pt sintered compact sputtering target and manufacturing method therefor
A technology of sputtering target and sintered body, which is applied in the manufacture of disc carriers, sputtering coating, sputtering coating, etc. It can solve problems such as abnormal discharge, lower product yield, and powder generation, and achieve reduction The amount of powder and the effect of suppressing abnormal discharge
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Embodiment 1
[0059] Fe—Pt alloy powder, hexagonal BN powder (flake shape) were prepared as raw material powders, and these powders were weighed so as to be 70(50Fe—50Pt)—30BN (mol%).
[0060] Next, Fe—Pt alloy powder and zirconia balls as grinding media were put into a media agitation mill with a capacity of 5 L, and treated at a rotation speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill and the BN powder were mixed with a V-type mixer and further mixed using a 150 μm mesh sieve, and the mixed powder was filled in a carbon mold and hot-pressed.
[0061] The hot pressing conditions were set to a vacuum environment, a heating rate of 300° C. / hour, a holding temperature of 1200° C., a holding time of 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool naturally in the chamber directly after holding.
[0062] Next, hot isostatic pressing is perfo...
Embodiment 2
[0066] Prepare Fe-Pt alloy powder, BN powder (flaky), SiO 2 powder as raw material powder. Weigh these powders to achieve 70(50Fe-50Pt)-5SiO 2 -25BN (mol%).
[0067] Next, Fe-Pt alloy powder and SiO 2 The powder was put into a media agitation mill with a capacity of 5 L together with zirconia balls as a grinding medium, and treated at a rotational speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill and the BN powder were mixed with a V-type mixer and further mixed using a 100 μm mesh sieve, and the mixed powder was filled in a carbon mold and hot-pressed.
[0068] The conditions of the hot pressing were the same as in Example 1: vacuum environment, heating rate 300° C. / hour, holding temperature 1100° C., holding time 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool naturally in the chamber directly after holding.
[0069] Ne...
Embodiment 3
[0072] Fe—Pt alloy powder, BN powder (flaky shape), Ag powder, and C (flaky graphite) powder were prepared as raw material powders. These powders were weighed to achieve 58(35Fe-10Pt)-20Ag-20BN-2C (mol%).
[0073] Next, Fe—Pt alloy powder and zirconia balls as grinding media were put into a media agitation mill with a capacity of 5 L, and treated at a rotation speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill was mixed with BN powder, C powder and Ag powder with a V-type mixer, and then mixed with a mortar, and the resultant was filled in a carbon mold and hot-pressed.
[0074] The hot pressing conditions were the same as in Example 1. The vacuum environment, the heating rate of 300° C. / hour, the holding temperature of 950° C., and the holding time of 2 hours were set, and the pressure was applied at 30 MPa from the start of heating to the end of holding. Cool naturall...
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