Microwave micro-plasma electron source

Abstract

The invention provides a microwave micro-plasma electron source. The micro-plasma electron source is a silicon-glass double-layered structure, wherein the lower layer is a silicon substrate and the upper layer is glass; a plasma cavity, an electronic accelerating lens, an electronic focusing lens, an energy filter and a detector are formed on the silicon substrate through a deep silicon etching technique, and then bonded with the glass to form the micro-plasma electron source. The micro-plasma electron source applies a high-pressure ceramic device to provide argon high-voltage drive, and then adopts a micro-strip resonator with a three-loop branching structure to provide argon for 1 W microwave power coupling with frequency of 2.4-2.5 GHz, thus a stable plasma is formed; through an electronic extraction, acceleration and focusing system, the electron is extracted and accelerated to focus to be a target electronic energy; the voltage applied by the electronic extraction, acceleration and focusing system determines the electronic beam energy of the charged ion source, and so as to further determine the scale of detectable matters of a mini-sized mass spectrometer.

Description

technical field [0001] The invention belongs to the field of mass spectrometry instruments, and relates to a micro-mass spectrometer with a scale of 100 microns, in particular to a microwave micro-plasma electron source, which can realize the ionization of a wide range of substances and broaden the application range of the micro-mass spectrometer. Background technique [0002] There are some relatively mature and commercialized products for micro-miniature mass spectrometers, but what they have in common is that each component of the mass spectrometer analysis system is processed separately by precision machining technology, and the components are assembled and combined with various interfaces. Together, there is no specific size design, which will bring assembly errors and interface design when combined, which will increase the detection error. Therefore, micro-electro-mechanical systems (MEMS) technology is used to process micro-mass spectrometers, that is, the various com...

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Problems solved by technology

It has been reported in the prior art that a microwave micro-plasma source is used as the electron source of the ion source, but it does not integrate the design of the impedance matching structure, but connects the impedance matching externally during use, and the welding capacitance that is easily introduced by the external impedance matching makes the The power reflection becomes larger, so that almost no power can be transmitted to the gas and cannot play the role of exciting and maintaining the plasma

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