Extreme ultraviolet laser amplification device and use method thereof

Abstract

The invention relates to an extreme ultraviolet laser amplification device and a use method thereof. The extreme ultraviolet laser amplification device comprises a light source, wherein a beam splitting piece is installed at one side of the light source and divides the light source into a stimulation light beam and a driving light beam, a delay device is installed at one side of the stimulation light beam, a first total reflective mirror and a second total reflective mirror are installed at one side of the delay device, an energy controller is installed between the first total reflective mirror and the second total reflective mirror, a 1 / 4 wave plate is installed under the second total reflective mirror, and a beam combination piece is installed under the 1 / 4 wave plate; a third total reflective mirror is installed under the driving light beam and located at one side of the beam combination piece, a focusing lens is installed at the other side of the beam combination piece, a gas box is installed at one side of the focusing lens, an aluminum film is installed at one side of the gas box, and extreme ultraviolet laser is arranged at one side of the aluminum film. The extreme ultraviolet laser amplification device and the use method thereof are simple in structure, easy to operate and high in practicability, not only can be used for generation and amplification of extreme ultraviolet laser, but also can be used for excited state feather research of other atom and molecule gas.

Description

technical field [0001] The present invention relates to an extreme ultraviolet laser amplification device and its use method. The interaction between a specially designed driving light source and an inert gas in an excited state is used to generate and amplify high-order harmonics, thereby obtaining extreme ultraviolet laser, which is suitable for extreme ultraviolet laser It is also applicable to the field of dynamics research of excited gas (atoms or molecules). Background technique [0002] Extreme ultraviolet light source is extremely important and indispensable in modern production or life. For example, in modern production, extreme ultraviolet light sources play an important role in high-precision micro-nano structure processing, high-precision engraving, high-precision imaging and other fields; in modern life, CT (Computed Tomography, computer tomography), DR ( Digital Radiography (radiography) is widely used, and the required light source is also in the extreme ultr...

AI Technical Summary

Problems solved by technology

[0003] The extreme ultraviolet laser is generally obtained in the form of high-order harmonics (the interaction between the strong-field laser and the material produces a high-order nonlinear effect, and the high-frequency output of the fundamental frequency light is obtained, thereby obtaining the extreme ultraviolet laser), but this method is extremely difficult to generate and inefficient

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