Film forming device and method

Abstract

The invention provides a film forming device and method. The device is used for forming an organic material film on a target position of a substrate and comprises a gas conveying mechanism and a gas injection mechanism, wherein the gas conveying mechanism is used for conveying a mixed gas of vapor of an organic material and an inert gas to the gas injection mechanism; the gas injection mechanism is used for injecting the mixed gas conveyed by the gas conveying mechanism to the target position on the substrate. The method comprises the following steps: conveying the mixed gas of vapor of the organic material and the inert gas to the target position on the substrate by using the film forming device provided by the invention, in order to deposit the organic material on the target position, wherein in the deposition process, the flow rate of the mixed gas at the early deposition stage of the organic material is smaller than the flow rate of the mixed gas at the middle deposition stage. Due to the film forming device and method provided by the invention, the film forming process of the organic material by deposition is easy to control, and target substrates with most sizes are applicable.

Description

technical field [0001] The invention relates to material processing, in particular to a film forming device and method. Background technique [0002] Organic materials are becoming more and more popular in the manufacture of optical devices. Using organic materials in optical device fabrication is relatively cheaper than using inorganic materials. Additionally, the inherent properties of organic materials, such as their flexibility, can make them well suited for specific applications such as flexible substrates. Organic optical devices include organic light-emitting devices (OLED, Organic Light-Emitting Diode), organic photosensitive transistors, organic photovoltaic cells and organic photodetectors. For OLEDs, organic materials can have significant performance advantages over conventional materials; for example, the wavelength at which an organic emissive layer emits light can often be fine-tuned with suitable dopants. [0003] Early approaches to organic materials invol...

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Problems solved by technology

Each of these two methods has disadvantages: the evaporation method is affected by factors such as the distance from the evaporation source and the size of the substrate, and can only form a film on a small substrate. When increasing the film forming speed, the temperature of the evaporation source needs to be raised. It is easy to cause changes in the physical and chemical properties of organic materials; the OVJP method is to spray the colloidal substance of organic materials onto the target area on the substrate. The material injection pressure, film thickness and speed are not easy to control, and it is easy to have uneven film thickness. The phenomenon

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