A film forming device and method

Abstract

The present invention provides a film-forming device and method. The device is used to form an organic material thin film at a target position of a substrate. The device includes a gas delivery mechanism and a gas injection mechanism, wherein: the gas delivery mechanism is used to transfer the organic material The mixed gas of steam and inert gas is delivered to the gas injection mechanism; the gas injection mechanism is used to inject the mixed gas delivered by the gas delivery mechanism to the target position on the substrate. In the method, the vapor of the organic material and the mixed gas of the inert gas are delivered to the target position on the substrate through the film forming device provided by the present invention, so that the organic material is deposited on the target position. During the deposition process, the The mixed gas flow rate at the beginning of the organic material deposition process is smaller than the mixed gas flow rate at the middle stage of the deposition process. The film-forming device and method provided by the invention make the organic material deposition and film-forming process easy to control, and are applicable to target substrates of most sizes.

Description

technical field [0001] The invention relates to material processing, in particular to a film forming device and method. Background technique [0002] Organic materials are becoming more and more popular in the manufacture of optical devices. Using organic materials in optical device fabrication is relatively cheaper than using inorganic materials. Additionally, the inherent properties of organic materials, such as their flexibility, can make them well suited for specific applications such as flexible substrates. Organic optical devices include organic light-emitting devices (OLED, Organic Light-Emitting Diode), organic phototransistors, organic photovoltaic cells and organic photodetectors. For OLEDs, organic materials can have significant performance advantages over conventional materials; for example, the wavelength at which an organic emissive layer emits light can often be fine-tuned with suitable dopants. [0003] Early approaches to organic materials involved deposi...

AI Technical Summary

Problems solved by technology

Each of these two methods has disadvantages: the evaporation method is affected by factors such as the distance from the evaporation source and the size of the substrate, and can only form a film on a small substrate. When increasing the film forming speed, the temperature of the evaporation source needs to be raised. It is easy to cause changes in the physical and chemical properties of organic materials; the OVJP method is to spray the colloidal substance of organic materials onto the target area on the substrate. The material injection pressure, film thickness and speed are not easy to control, and it is easy to have uneven film thickness. The phenomenon

Images