Cr2O3 and Al2O3 complex gradient hydrogen resistant coating and preparation method and application thereof
A composite coating and coating technology, which is applied in chemical instruments and methods, coatings, lighting and heating equipment, etc., can solve the problems affecting the density and hydrogen barrier performance of coating materials, and affect the reliability of coatings, etc., to achieve compactness High performance, improved hydrogen barrier performance, and excellent hydrogen barrier performance
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Embodiment 1
[0034] (1) Polish the inner surface of the martensitic stainless steel tube 3 of the high-temperature vacuum heat collecting tube to a roughness of 1 μm;
[0035] (2) Preparing Cr on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; the specific process parameters are: reaction source temperature 150°C; carrier gas flow rate 200ml / min;
[0036] (3) Prepare Al on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; specific process parameters are: reaction source temperature 100°C; carrier gas flow rate 100ml / min;
[0037] (4) Repeat the above step (2);
[0038] (5) Repeat the above step (3);
[0039] Finally, a multilayer Cr with a thickness of about 0.5 μm is obtained 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating.
[0040] Determination of multilayer Cr 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating a...
Embodiment 2
[0042] (1) Polish the inner surface of the austenitic stainless steel tube 3 of the high-temperature vacuum heat collecting tube to a roughness of 0.5 μm;
[0043] (2) Preparing Cr on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; specific process parameters are: reaction source temperature 180°C; carrier gas flow rate 200ml / min;
[0044] (3) Prepare Al on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; the specific process parameters are: reaction source temperature 120°C; carrier gas flow rate 150ml / min;
[0045] (4) Repeat the above step (2);
[0046] (5) Repeat the above step (3);
[0047] Finally, a multilayer Cr with a thickness of about 1 μm is obtained 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating.
[0048] Determination of multilayer Cr 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating at...
Embodiment 3
[0050] (1) Polish the inner surface of the austenitic stainless steel tube 3 of the high-temperature vacuum heat collecting tube to a roughness of 0.3 μm;
[0051] (2) Preparing Cr on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; specific process parameters are: reaction source temperature 200°C; carrier gas flow rate 200ml / min;
[0052] (3) Prepare Al on the inner surface of the stainless steel tube 3 by metal-organic chemical vapor deposition technology 2 o 3 Coating; specific process parameters are: reaction source temperature 160°C; carrier gas flow rate 80ml / min;
[0053] (4) Repeat the above step (2);
[0054] (5) Repeat the above step (3);
[0055] Finally, a multilayer Cr with a thickness of about 0.8 μm is obtained 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating;
[0056] Determination of multilayer Cr 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating at 40...
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