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Multi-mode laser-induced breakdown spectroscopy device

A laser-induced breakdown, multi-mode technology, applied in the field of laser spectroscopy, can solve the problems that the effect cannot meet the requirements of LIBS technology, cannot achieve LIBS microsecond-level control, and cannot control the timing, so as to improve the collection efficiency and spectrum. Line strength, improve detection repeatability, avoid the effect of re-covering

Active Publication Date: 2015-03-11
ZHEJIANG UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

There are also patents that use the optical path to realize a certain working mode with a laser, but the effect cannot meet the requirements of LIBS technology.
For example, the laser-induced spectroscopy detection system for double-pulse defocus pre-ablation of patent application CN103323435A uses two optical paths to realize the LIBS collinear double-pulse working mode, but the timing of the first laser beam and the second laser beam cannot be controlled and cannot be obtained. best spectral line
Although the laser-induced breakdown spectroscopy measurement device described in the patent application CN103529000A uses a single laser with two optical paths to realize the vertical working mode, the control time of the optical shutter is generally at the millisecond level, which cannot meet the control requirements of LIBS at the microsecond level.

Method used

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Embodiment Construction

[0041] Such as figure 1 As shown, the multi-mode laser-induced breakdown spectroscopy device in the present invention includes: a double-pulse solid-state laser 1, a delay generator 2, an energy attenuator 3, a laser energy real-time monitoring system 4, an optical path climbing system 5, and an ICCD detector 6. A spectroscopic system 7 , a second focusing lens 8 , a sample stage 9 , a first focusing lens 10 , an optical fiber collection system 11 , and a sample surface imaging system 12 .

[0042] The double-pulse solid-state laser 1 has four working modes: (1) 1064nm coaxial output, (2) 532nm coaxial output, (3) 1064nm non-coaxial output, (4) 1064nm, 532nm non-coaxial output. The double-pulse solid-state laser 1 can be realized by two single-pulse 1064nm solid-state lasers, a frequency doubling crystal and a beam combining optical path.

[0043] The delay generator 2 controls the trigger time of Q-switching of the double-pulse solid-state laser 1, the trigger time of turnin...

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Abstract

The invention discloses a multi-mode laser-induced breakdown spectroscopy device. The multi-mode laser-induced breakdown spectroscopy device comprises three operating modes which are collineation, reheating and pre-ablation; in the collineation operating mode, an optical path climbing system is arranged on the optical path of a double pulse solid laser, and is used for raising the optical path of 1065nm / 532nm coaxially output laser, so as to ensure that laser is focused to the surface of a sample from the part above a sample table to produce plasma; in the reheating and pre-ablation operating modes, first laser of the double pulse solid laser enters the optical path climbing system, and the optical path of the first laser is raised, so that the first laser is focused to the surface of the sample from the part above the sample table to produce plasma; a delay generator controls the triggering timing sequence of the first laser and second laser; the second laser of the double pulse solid laser is directly focused to the plasma; the multi-mode laser-induced breakdown spectroscopy device further comprises a signal gathering and processing system which displays distribution information of elements on the surface of the sample according to characteristic spectral lines emitted by the plasma when the plasma is cooled and space information of the first laser when the first laser beats the sample.

Description

technical field [0001] The invention relates to the technical field of laser spectroscopy, in particular to a multi-mode laser-induced breakdown spectroscopy device. Background technique [0002] LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy (Laser-Induced Breakdown Spectrometer). The emitted spectrum is used to identify the elemental composition in the sample, and then the identification, classification, qualitative and quantitative analysis of materials can be carried out. This technology does not require sample pretreatment, and can quickly realize remote and micro-destructive detection of sample elements (especially metal elements), and can be used for the detection of solid, gas, and liquid samples. Laser-induced breakdown spectroscopy is also used in a wide range of applications, such as biomedicine, archaeology, environmental monitoring, detection of heavy metals in water, and detection of explosives. [0003] Compared with single-pulse laser-indu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63
CPCG01N21/718
Inventor 何勇彭继宇刘飞余克强方慧宋坤林
Owner ZHEJIANG UNIV
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