Manufacturing method of over-temperature self-protection thyristor for electric heating equipment

A manufacturing method and electric heating technology

Active Publication Date: 2017-02-08
ANSHAN LIANGXI POWER TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This requires the addition of commutation circuits, which not only increases the volume and weight of the equipment, but also reduces efficiency and generates waveform distortion and noise

Method used

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  • Manufacturing method of over-temperature self-protection thyristor for electric heating equipment
  • Manufacturing method of over-temperature self-protection thyristor for electric heating equipment
  • Manufacturing method of over-temperature self-protection thyristor for electric heating equipment

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Embodiment 1

[0079] [Example 1] A batch of over-temperature self-protection thyristors were produced by adopting the method of the present invention

[0080] The specific production process is as follows:

[0081] Put the monocrystalline silicon wafer in detergent: deionized water = 30ml: 500ml of cleaning solution for ultrasonication for 1 hour, rinse with hot deionized water for 30 times, and rinse with cold deionized water for 30 times; place the silicon wafer in four On the fluorine rack, use pure hydrofluoric acid to sonicate for 10 minutes, rinse with normal temperature deionized water for 30 times, and then rinse with hot deionized water for 30 times; then place the silicon wafer in a sodium hydroxide solution with a mass concentration of 5%, Boil in a constant temperature water bath at 85°C for 1 minute, rinse with cold deionized water for 30 times, and hot deionized water for 30 times, and test that the resistivity of the effluent water after cleaning reaches 10MΩ or more, then pu...

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Abstract

The invention relates to a method for manufacturing an overtemperature self-protection thyristor for electric heating equipment. The method comprises the following steps of (1) silicon wafer cleaning, (2) quartz closed tube cleaning, (3) primary perfect diffusion of a gallium and aluminium source, (4) P+ diffusion, (5) oxidization, (6) one-time photoetching, (7) phosphorus diffusion, (8) circle cutting, (9) sintering, (10) evaporation, (11) alloying, (12) secondary photoetching, (13) table surface forming, (14) packaging and (15) thyristor testing. The method for manufacturing the overtemperature self-protection thyristor for the electric heating equipment has the advantages that a temperature controller is additionally arranged in a control electrode loop and so that overtemperature protection can be achieved; the manufacturing process technology of high-purity gallium and high-purity aluminium source one-time perfect diffusion is used, diffusion is even, and efficiency is high; (3) an anode P+ diffusion technology is used for lowering the contact pressure drop of the silicon wafer and a molybdenum plate; (4) in the sintering process, a computer program control instrument is used for controlling the sintering temperature of the equipment, precision and stabilization are achieved, and the consistency is good; (5) an outer sealing tube shell is sealed by oxygen-free copper and ceramics, the heat resistance is small, and the dampproof performance is high.

Description

technical field [0001] The invention relates to the technical field of thyristor manufacture, in particular to a method for manufacturing an over-temperature self-protection thyristor for electric heating equipment. Background technique [0002] At present, high-power thyristors are generally used as control switches in high-power electric heating devices in China. It can adjust the output power to the load according to the requirements of the load temperature, thereby controlling the temperature of the load to be constant at the required temperature. However, once the device If there is a fault, the load is short-circuited or the heat dissipation of the thyristor is problematic, the temperature of the thyristor will rise. When the temperature exceeds the rated junction temperature of the thyristor, the thyristor will burn out, causing damage to the components and the entire device. At this time, the device must be disassembled to replace the original , affecting the normal ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/332H01L21/56
Inventor 于能斌于泽张宏伟王景波刘欣宇
Owner ANSHAN LIANGXI POWER TECH
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