A kind of preparation method and application of oxide film material with shape memory effect

Abstract

A method for preparing an oxide film material with a shape memory effect: using pulsed laser deposition technology to prepare a two-phase coexisting BiFe03 film on a high-quality mismatched single crystal substrate; using focused ion beam etching technology to prepare it in the previous step Preparation of pure phase nanostructures in BiFe03 films where two phases coexist. Applications of the thin film nanostructures are also disclosed. The effect of the present invention is to successfully prepare a ferroelectric oxide material with a huge shape memory effect by using epitaxial growth technology and focused ion beam etching means. Electric field, temperature, and stress can all affect the shape memory strain of this material, and its maximum reversible strain is as high as 14%. Since the electric field can also control the shape memory effect of this material, its operating frequency is higher than that of traditional alloy materials. In addition, this shape strain is achieved at the nanoscale, making it possible to replace traditional alloy materials in Sensing, driving and other applications in small size.

Description

technical field [0001] The invention relates to the field of oxide thin film materials, in particular to a preparation method and application of an oxide thin film material with shape memory effect. Background technique [0002] Ferroic materials usually refer to functional material systems with order parameters such as ferroelectricity, ferroelasticity, and ferromagnetism, including ferroelectric / piezoelectric, magnetostrictive materials, and shape memory alloys. They have great application potential in many functional structures and devices such as sensing actuation, etc. Piezoelectric materials such as (1-x)[Pb(Mg 1 / 3 Nb 2 / 3 )O 3 ]-x[PbTiO 3 ] usually exhibit a high mechanical response under an electric field and can be used for actuators or sensors (Fuetal., Nature403,281(2000); Liuetal., Phys.Rev.Lett.103,257602(2009); Kutnjak et al., Nature441 , 956(2006)). In these functional applications, mechanical strain often plays a crucial role. However, a maximum electri...

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Problems solved by technology

[0006] Due to BiFeO 3 It is a ferroelectric material, can it be regulated by electric field instead of temperature? In order to achieve the shape memory effect, the current shape memory alloys are all under the action of temperature, stress, and magnetic field to achieve recoverable strain, which will inevitably increase the working cycle of materials and devices, which is not conducive to the application of devices at higher response frequencies.

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