High dynamic range laser far-field focal spot measurement device and method
A high dynamic range, far-field focal spot technology, applied in the optical field, can solve problems such as limited resolution, detector damage, focal spot distortion, etc., to achieve the effect of ensuring measurement accuracy, high confidence, and high stability
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[0028] Such as figure 1 As shown, the present invention consists of a laser beam shrinkage / expansion system 1, an attenuation wedge 2, a beam splitter 3, a scientific grade CCD detector 4, a microlens array 5, a CCD detector 6, and a control computer 7. The laser beam reduction / expansion system 1 is composed of an objective lens 8 and an eyepiece 9, which is a Keplerian structure, adopts a double-telecentric optical path, and performs an achromatic design to ensure the wide-spectrum operation of the test system and eliminate the position error of the detector. influence on the measurement results. Select the laser beam shrinking / expanding system 1 that matches the beam shrinking / expanding ratio according to the measured laser beam aperture. According to the energy of the laser beam to be measured, the attenuation wedge 2 with a suitable attenuation ratio is selected to ensure that the scientific grade CCD detector 4 and the CCD detector 6 work in the linear response region. ...
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