Method for determining membrane stress value of periphery clamped circular membrane under effect of concentrated force
A thin-film stress, circular thin-film technology, applied in the field of thin-film stress value determination, can solve problems such as difficult and difficult numerical calculation results
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[0035] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
[0036] Such as figure 1 As shown, a circular film with a radius of a, a thickness of h, a Young’s modulus of elasticity of E, and a Poisson’s ratio of v is fixed and clamped around its circumference, and a flat-bottomed cylinder with a radius of b is used as the loading axis. A transverse load F is applied at the center of the circular film. Before loading, apply talcum powder on the flat bottom of the cylinder to reduce the friction between the film / substrate. When loading, the cylinder and the circular film are kept on the same axis, and record α =b / a, then based on the static equilibrium analysis of this axisymmetric circular membrane problem, using the load measurement value F, the membrane stress value σ at point r r , can be calculated and determined according to the following three situations:
[0037] Situation ① If
[0038] (1+ν)(3-α 2...
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