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Preparation method of double-layer graphene films

A double-layer graphene and thin film technology, applied in graphene, coating, metal material coating process and other directions, can solve the urgent problems of production technology, and achieve the effect of uniform and stable structure, high surface coverage and excellent performance

Inactive Publication Date: 2013-12-25
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current production process is mostly based on the preparation of single-layer graphene by CVD method, so it is particularly urgent to develop a large-area, uniform and controllable production technology for high-quality, low-defect double-layer graphene.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0017] Embodiment 1: Utilize copper foil as metal foil, methane gas as carbon source, triethyl borate as cocatalyst, prepare double-layer graphene

[0018] 1) Clean the copper foil with a thickness of 25um in acetone, isopropanol, deionized water, and ethanol for 10 minutes respectively, and dry the surface of the copper foil with nitrogen;

[0019] 2) Spin-coat 120nm-thick triethyl borate (purity of triethyl borate is 97%) on the surface of copper foil, and bake at 50°C for 3 minutes to obtain a combination of triethyl borate and copper foil;

[0020] 3) Place the quartz boat carrying the combination of triethyl borate and copper foil in the reaction chamber of the chemical vapor deposition (CVD) equipment, and evacuate to a pressure of 2×10 -4 Pa; then pass in hydrogen to make the air pressure in the reaction chamber of the equipment reach 170pa, and then raise the temperature in the reaction chamber of the equipment to 1000°C within 40 minutes and keep it for 30 minutes to ...

Embodiment 2

[0023] Embodiment 2: Utilize the copper-nickel alloy foil that contains 3%wt nickel content as metal substrate, acetylene gas as carbon source, the decaborane-anisole mixed solution of 0.04g / ml as cocatalyst, prepare double-layer graphene

[0024] 1) Spin-coat a mixture of decaborane-anisole with a thickness of 60nm and a concentration of 0.04g / ml on the surface of copper-nickel alloy foil, and bake at 60°C for 5 minutes to obtain a mixture of decaborane-anisole Liquid and copper-nickel alloy foil combination;

[0025] 2) Place the quartz boat carrying the decaborane-anisole mixture and the copper-nickel alloy foil combination in the reaction chamber of the chemical vapor deposition (CVD) equipment, and evacuate to a pressure of 2.5×10 -4 Pa; then hydrogen gas is introduced to make the air pressure in the reaction chamber of the equipment reach 300pa, and then the temperature in the reaction chamber of the equipment is raised to 900°C within 50 minutes and kept for 20 minutes ...

Embodiment 3

[0028] Embodiment 3: Utilize 700nm thick copper thin film as metal base, ethanol as carbon source, triethyl borate is cocatalyst, prepares bilayer graphene

[0029] 1) Spray 100nm thick triethyl borate (triethyl borate purity 97%) on the surface of 700nm thick copper film, and bake at 40°C for 2 minutes to obtain a combination of triethyl borate and copper film;

[0030] 2) Place the quartz boat carrying the combination of triethyl borate and copper film in the reaction chamber of the chemical vapor deposition (CVD) equipment, and evacuate to a pressure of 3.2×10 -4 Pa; then feed hydrogen to make the air pressure in the reaction chamber of the equipment reach 600pa, and then raise the temperature in the reaction chamber of the equipment to 850°C for 10 minutes within 35 minutes to remove the oxide layer on the surface of the copper film and make the cocatalyst triethyl borate The ester is fully soluble in the copper film;

[0031] 3) Keep the temperature in the reaction chamb...

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Abstract

The invention discloses a preparation method of double-layer graphene films, which belongs to the technical field of film materials. A catalyst promoter is coated on a cleaned metal foil by spin coating, and then, by using a chemical vapor deposition method, a double-layer graphene film is obtained on the metal foil. According to the method disclosed by the invention, graphene prepared on a metal foil and by using an introduced catalyst promoter is of a double-layer structure, and the coverage rate of the double-layer grapheme is greater than 90%, therefore, the method has the advantages of simple technological process, high controllability on the number of graphene layers, high surface coverage rate of double-layer grapheme, less defects, and the like. The method is applicable to the large-area mass controllable production and preparation of double-layer graphene films, and can be widely applied to the fields of microelectronic and optoelectronic devices.

Description

technical field [0001] The invention belongs to the technical field of thin film materials, and relates to graphene thin films, in particular to a preparation method of graphene thin films. Background technique [0002] Graphene is a carbon atom with sp 2 Hybrid orbitals make up planar thin-film materials of a two-dimensional hexagonal honeycomb lattice. Since it was invented by Andre Geim and Konstantin Novoselov of the University of Manchester in 2004, it has attracted widespread attention from scientists around the world. For this reason, they were nominated for the "Nobel Prize in Physics" in 2008 and finally won the "Nobel Prize in Physics" in 2010. The invention of graphene not only reflects a major breakthrough in theory, but also has such advantages as: the highest electron mobility and maximum carrying current density among all materials, bipolar field effect, and can realize continuous from N-type to P-type Modulation, fractional quantum Hall effect, good transp...

Claims

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Application Information

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IPC IPC(8): C01B31/04C23C16/26C01B32/186
Inventor 陈远富刘竞博李萍剑王泽高张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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