Turning clamp and turning method of polycrystalline rod material

Abstract

The invention relates to a turning clamp and turning method of a polycrystalline rod material. A left end fixing disk is a cylinder, one end of the left end fixing disk is a step shape, a blind hole is formed in the bottom end of the interior of a hole in the other end of the left end fixing disk, the upper end of the interior of the hole in the other end of the left end fixing disk is an inner conical surface, a right end fixing disk is a cylinder, one end of the right end fixing disk is a plane, and the other end of the right end fixing disk is a round protruding surface. The turning method of the polycrystalline rod material comprises the steps that a three-jaw chuck at the left end of a lathe is used for fixedly clamping the left end fixing disk with the inner conical surface, the left end fixing disk is used for fixing one side, with a conical surface, of the polycrystalline rod material in the process of machining, the end face of the other side of the polycrystalline rod material bonds with the right end fixing disk, a center of a tailstock of the lathe is used for carrying out centering abutting operation, a hard alloy tool is tightly clamped, after tool setting is accomplished, turning of the polycrystalline rod material is carried out according to preferable technological parameters which include that the cutting speed is 94m / min, the longitudinal feed ratio is 0.2, the amount of feed is 2mm and the angle of feed is 80 degrees, meanwhile, a dust removal and cooling device is started, and inspection is carried out according to the requirement for machining accuracy after turning is accomplished. The turning clamp and turning method of the polycrystalline rod material are stable in clamping, low in radial runout and high in safety, and improve machining efficiency and the product percent of pass.

Description

technical field [0001] The invention relates to the field of machining and preparing materials for polycrystalline silicon rods in the semiconductor industry, in particular to a turning fixture and a turning method for polycrystalline silicon rods. Background technique [0002] The processing of polycrystalline rods is to provide raw materials for pulling single crystals, and there are strict dimensional requirements for the geometry of the processed rods. Bars with irregular geometric shapes often cause problems during crystal pulling, which is not conducive to the automatic growth of crystals. [0003] At present, imported abrasive belt machines are generally used in the industry to process polycrystalline bars. Although they can guarantee better processing accuracy, the purchase cost is high and the processing efficiency is low. There is no special turning machine tool for polycrystalline bar at home and abroad, and the corresponding technical transformation of the exist...

AI Technical Summary

Problems solved by technology

[0004] In view of the deficiencies in the prior art, the present invention provides a polycrystalline bar turning jig and turning method, which adopts a newly designed jig and a new processing method to solve the problem that polycrystalline bar is prone to geometrical irregularities during processing. Rules, problems that cannot meet the process requirements, in order to meet the processing accuracy requirements for raw materials

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