High spatial resolution dual-axis confocal atlas microscopy imaging method and device
A high spatial resolution, microscopic imaging technology, applied in the field of spectral measurement, can solve the problems of low collection efficiency, unfavorable light source intensity fluctuation suppression, insufficient spatial resolution, etc., to improve measurement accuracy and micro-area Raman spectrum detection capabilities , Improve the effect of horizontal resolution
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[0043] In this embodiment, the light source 1 is a laser, the polarization modulation system 29 is a radially polarized light generator, the dichroic light splitting system 8 is a Notch filter, the data processing system 21 is a computer, and the image acquisition system 11 is a CCD detector. 24 is a CCD detector, and the image magnification system 10 is a magnifying objective lens.
[0044] Such as figure 1 , figure 2 and Figure 5 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 31, where θ 1 = θ 2 , a high spatial resolution dual-axis confocal atlas microscopic imaging method, the measurement steps are:
[0045] Firstly, t...
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