Display, thin film transistor array substrate and manufacturing process thereof

Abstract

The invention relates to a display, a thin film transistor array substrate and a manufacturing process thereof. Wherein, the thin film transistor array substrate includes: a gate electrode, an active layer, and the gate electrode and the active layer are separated by a black matrix; a source electrode, a drain electrode and a channel; a color filter layer, and a pixel electrode. The display of the present invention includes the thin film transistor array substrate of the present invention. The manufacturing process of the thin film transistor array substrate of the present invention includes forming the pattern of the gate line and the gate electrode on the substrate; forming the pattern of the black matrix; forming the pattern of the active layer and the source / drain electrode; forming the pattern of the color filter layer; A pattern of pixel electrodes is formed. The thin film transistor array substrate of the present invention omits the gate insulating layer and the protective layer, and avoids two plasma gas phase film forming processes, significantly shortens the process time and reduces the complexity of the process; meanwhile, the thickness of the substrate is effectively thinned. The manufacturing process of the thin film transistor array substrate of the present invention effectively reduces the times of film formation and shortens the process time.

Description

technical field [0001] The invention relates to the technical field of liquid crystal displays, in particular to a display, a thin film transistor array substrate and a manufacturing process thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD) has the advantages of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. For TFT-LCD, the thin film transistor array substrate and manufacturing process determine its product performance, yield and price. [0003] The traditional TFT-LCD consists of a TFT thin film transistor array substrate and another color filter substrate (ColorFilter). On the TFT thin film transistor array substrate are formed control switching thin film transistors and pixel electrodes, and on the color filter substrate are formed red, green, blue light filter layers and common electrodes. The liquid crystal molecules are sandwiched between the t...

AI Technical Summary

Problems solved by technology

[0006] The fabrication of the TFT thin film transistor array substrate with this structure requires eight mask exposure processes to form the gate electrode 102, the active layer 104, the source / drain electrodes (105, 106), the protective layer 107, the black matrix 108, and the color filter. film 109 (the three primary colors require a total of three mask exposure processes) and pixel electrodes 110, and a gate insulating layer 103 and a protective layer 107 are also provided at the same time, so that the entire process has many steps, high complexity, and low yield

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