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Organic-substrate-based passive radio capacitive humidity sensor packaging structure

A humidity sensor and packaging structure technology, applied in the field of sensors, can solve the problems of inability to use lead wires and deepening of sensor miniaturization, achieve the effects of reduced volume, low power consumption, and avoiding device failure

Inactive Publication Date: 2013-07-10
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the miniaturization of sensors is deepening, and the problem of lead wires is a major problem that needs to be solved. In addition, lead wires cannot be used in some occasions, which requires the use of wireless sensors.

Method used

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  • Organic-substrate-based passive radio capacitive humidity sensor packaging structure
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  • Organic-substrate-based passive radio capacitive humidity sensor packaging structure

Examples

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Embodiment Construction

[0024] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0025] like Figure 1 to Figure 3 As shown, a passive wireless capacitive humidity sensor packaging structure based on an organic substrate of the present invention includes a humidity sensitive capacitor 1, an organic packaging substrate 2, a planar spiral inductor 3 provided with an internal connection line 17 and an external port 18, and a back surface Connection lines 7 , external connection pads 8 , internal connection pads 9 , cover 13 , upper cover layer 15 and lower cover layer 16 . The organic packaging substrate 2 can be made of polyimide (PI), liquid crystal polymer (LCP), or polyethylene terephthalate (PET). The humidity sensitive capacitor 1 is fixedly connected to the top surface of the organic packaging substrate 2 through the adhesive layer 4 . The planar spiral inductor 3 is fixedly connected to the...

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Abstract

The invention discloses an organic-substrate-based passive radio capacitive humidity sensor packaging structure, which comprises a humidity sensitive capacitor, an organic packaging substrate, a planar spiral inductor, a back connecting wire, an external connection pad, an internal connection pad, a sealing cover, an upper covering layer and a lower covering layer, wherein the humidity sensitive capacitor and the planar spiral inductor are respectively and fixedly connected to the top surface of the organic packaging substrate; one end of the back connecting wire is connected with an external port of the planar spiral inductor, and the other end of the back connecting wire is connected with the external connection pad which is connected with one electrode of the humidity sensitive capacitor; an internal connecting wire of the planar spiral inductor is connected with the internal connection pad which is connected with the other electrode of the humidity sensitive capacitor; and the sealing cover is fixedly connected onto the organic packaging substrate through an adhesive layer. The humidity sensor packaging structure consists of the wireless passive elements and has the performance advantages of no contact, small size and low power consumption.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a packaging structure of a passive wireless capacitive humidity sensor based on an organic substrate. Background technique [0002] Humidity sensors are widely used in meteorological detection, agricultural production, industrial control, medical equipment and other fields. In recent years, the development of humidity sensors tends to be more and more miniaturized. Existing miniature humidity sensor types mainly include capacitive, resistive, piezoresistive and micro-electro-mechanical systems (full name in English: Micro-Electro-Mechanical Systems, abbreviated in the text: MEMS) and so on. There are currently two types of wireless telemetry sensors: active telemetry and passive telemetry. Active telemetry means that the sensing system has a power source. This type of telemetry can transmit sensor signals in both directions over long distances, but the system is com...

Claims

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Application Information

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IPC IPC(8): G01N27/22
Inventor 陈洁张聪秦明
Owner SOUTHEAST UNIV
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