Method for preparing hot pressed sintered high-density magnesium oxide target

A hot-pressing sintering and magnesia technology, which is applied in the preparation of hot-pressing sintered high-density magnesia targets and the preparation of magnesia targets, can solve the problems of target deformation, low target purity, and low yield. , to achieve the effect of not easy to deform and crack, simple preparation process and high yield

Inactive Publication Date: 2013-04-10
沈阳临德陶瓷研发有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Pressureless sintering is prone to deformation, uneven target surrounding structure, and low yield; due to the need for a large amount of binder in slip casting, it is easy to cause low purity of the target, and the need to exclude the binder in the sintering stage is easy to cause target damage. Deformation or cracking, hot isostatic pressing also limits its application in target preparation due to its high cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0006] Embodiment 1: Weigh a certain amount of high-purity nano-magnesia powder with an average particle diameter of 50 nm and a purity of ≥99.99%. Select the diameter of the target prepared according to the requirements and select the mold with the same diameter, put the mold into the hot-press sintering furnace, and gradually load the raw materials into the mold by moving the vibrating funnel evenly and reciprocatingly, the purpose is to make the powder accumulate evenly in the mold, And measure the material height of a group of point powder in the mold, the height difference of each point is less than 0.5mm. The furnace is evacuated, and when the vacuum is 150MPa, turn on the power and start heating. When the temperature reaches 900°C, start to pressurize until the temperature reaches 1450°C. The pressurization rate was 1 MPa / min. When the pressure reaches 50MPa, keep the pressure for 50 minutes. When the pressure head on the press reaches the specified displacement, turn...

Embodiment 2

[0007] Embodiment 2: weighing a certain amount of high-purity nano-magnesia powder with an average particle diameter of 70nm and a purity of ≥99.99%. Select the diameter of the target prepared according to the requirements and select the mold with the same diameter, put the mold into the hot pressing sintering furnace, and gradually load the raw materials into the mold by moving the vibrating funnel evenly and reciprocatingly, the purpose is to make the powder accumulate evenly in the mold, And measure the material height of a group of point powder in the mold, the height difference of each point is less than 0.5mm. The furnace is evacuated, and when the vacuum is 200MPa, turn on the power and start heating. When the temperature reaches 900°C, start to pressurize until the temperature reaches 1500°C, and the pressurization rate is 1MPa / min. When the pressure reaches 40MPa, keep the pressure for 40 minutes. When the pressure head on the press reaches the specified displacement...

Embodiment 3

[0008] Embodiment 3: Weigh a certain amount of high-purity nano-magnesia powder with an average particle diameter of 60 nm and a purity of ≥99.99%. Select the diameter of the target prepared according to the requirements and select the mold with the same diameter, put the mold into the hot pressing sintering furnace, and gradually load the raw materials into the mold by moving the vibrating funnel evenly and reciprocatingly, the purpose is to make the powder accumulate evenly in the mold, And measure the material height of a group of point powder in the mold, the height difference of each point is less than 0.5mm. The furnace is evacuated, and when the vacuum is 400MPa, turn on the power and start heating. When the temperature reaches 900°C, start to pressurize until the temperature reaches 1500°C, and the pressurization rate is 1MPa / min. When the pressure reaches 20MPa, keep the pressure for 50 minutes. When the pressure head on the press reaches the specified displacement, ...

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PUM

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Abstract

The invention discloses a method for preparing a hot pressed sintered high-density magnesium oxide target and mainly solves the technical problems of easiness in transformation, low rate of finished products, higher cost and low purity of the target in the prior art. The method comprises the following steps of: a, weighing nano-sized magnesia powder with a certain amount and high purity, and selecting a mould which has the same diameter as the target prepared according to the requirement; b, placing the mould into a hot-pressing sintering furnace body, charging by a vibration funnel method, measuring and ensuring that the stack heights of the powders in the mould are the same; and c, vacuumizing, heating and pressurizing, and maintaining pressure until the sintered size of the magnesium oxide target is a design value. The method has a simple preparation process and can quickly enable the product to be densified; the prepared product has the advantages of high density, fine grain and the like; other impurities cannot be introduced; the product is difficult to deform and crack during sintering; the rate of finished products is high; and the high-density high-purity magnesium oxide target can be prepared by the method.

Description

technical field [0001] The invention relates to a method for preparing a magnesium oxide target, in particular to a method for preparing a hot-pressed sintered high-density magnesium oxide target, which belongs to the technical field of new material preparation and application. Background technique [0002] The sputtering deposition film of high-density MgO target is mainly used in the plasma display panel (PDP) [Plasma Display Panel], on the dielectric layer, as the dielectric protection layer of the plasma display screen, not only can withstand sputtering The impact of ions prolongs the working life of PDP, and can reduce the ignition voltage and maintenance voltage of glow discharge in the cavity, improve its luminous intensity, and have a high enough transmittance in the visible light region, which plays an extremely important role in the working process of PDP. effect. The previous molding methods, such as: pressureless sintering, slip casting, cold isostatic pressing,...

Claims

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Application Information

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IPC IPC(8): C04B35/01C04B35/645
Inventor 韩绍娟许壮志薛健张明张翠敏吴学坤
Owner 沈阳临德陶瓷研发有限公司
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