Preparation method of tungsten carbide composite powder
A composite powder, tungsten carbide technology, applied in the coating and other directions, can solve the problems of WC being easily polluted, complex process, environmental pollution, etc., and achieve the effects of easy control, simple process, and dense film formation
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Embodiment 1
[0016] Embodiment 1: a kind of preparation method of tungsten carbide composite powder is characterized in that concrete steps are as follows:
[0017] (1) Use a microparticle magnetron sputtering apparatus to coat the powder surface, using DC sputtering mode;
[0018] (2) Get 100 grams of pure WC powder as the coated base material and place it in the sample box of the sputtering instrument, and use the metal Co to be coated as the sputtering target;
[0019] (3) When the vacuum degree in the vacuum chamber reaches 1.0×10 -3 Pa, fill the vacuum chamber with high-purity argon, set the working pressure in the vacuum chamber to 0.3Pa, and the substrate temperature to 20°C;
[0020] (4) Open the swing device and the ultrasonic vibration device of the sample box, the ultrasonic vibration frequency is 10kHz, the vibration power is 5W, and the swing frequency of the sample box is 3 times / min;
[0021] (5) Turn on the sputtering power supply, adjust the sputtering current to 0.2A, t...
Embodiment 2
[0025] Embodiment 2: a kind of preparation method of tungsten carbide composite powder is characterized in that concrete steps are as follows:
[0026] (1) Use a microparticle magnetron sputtering instrument for powder surface coating, using radio frequency sputtering mode;
[0027] (2) Get 50 grams of pure WC powder as the coated base material and place it in the sample box of the sputtering instrument, and use the metal Ni to be coated as the sputtering target;
[0028] (3) When the vacuum degree in the vacuum chamber reaches 4.0×10 -3 Pa, fill the vacuum chamber with high-purity argon, set the working pressure in the vacuum chamber to 5.0Pa, and the substrate temperature to 300°C;
[0029] (4) Open the swing device and the ultrasonic vibration device of the sample box, the ultrasonic vibration frequency is 30kHz, the vibration power is 40W, and the swing frequency of the sample box is 20 times / min;
[0030] (5) Turn on the sputtering power supply, adjust the sputtering cu...
Embodiment 3
[0034] Embodiment 3: a kind of preparation method of tungsten carbide composite powder is characterized in that concrete steps are as follows:
[0035] (1) Use a microparticle magnetron sputtering apparatus to coat the powder surface, using pulse sputtering mode;
[0036] (2) Get 80 grams of pure WC powder as the coated base material and place it in the sample box of the sputtering instrument, and use the metal Cu to be coated as the sputtering target;
[0037] (3) When the vacuum degree in the vacuum chamber reaches 3.0×10 -3 Pa, fill the vacuum chamber with high-purity argon, set the working pressure in the vacuum chamber to 2.0Pa, and the substrate temperature to 100°C;
[0038] (4) Open the swing device and the ultrasonic vibration device of the sample box, the ultrasonic vibration frequency is 20kHz, the vibration power is 20W, and the swing frequency of the sample box is 10 times / min;
[0039] (5) Turn on the sputtering power supply, adjust the sputtering current to 0....
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