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Cleaning composition

A cleaning composition, a technology for the composition, applied in the directions of detergent compositions, non-surface-active detergent compositions, organic non-surface-active cleaning compositions, etc. Water effect, etc.

Inactive Publication Date: 2013-03-13
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since this cleaning agent does not contain an organic solvent such as glycol ether, there are problems in that it does not have sufficient ability to remove organic pollutants such as oil and the like, and that it does not sufficiently demonstrate the effect of cleaning. Afterwards, the effect of imparting hydrophilicity to the surface of the substrate
But this cleaning agent also has problems, silicon-based glass substrates or silicon nitride films are corroded by the added fluoride, and metals such as copper are also corroded

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1 to 16 and comparative example 1 to 5

[0051] Examples 1 to 16 and Comparative Examples 1 to 5: Preparation of cleaning compositions

[0052] The cleaning composition was prepared by mixing the components given in Table 1 below at the corresponding composition ratio in a mixing chamber equipped with a stirrer, and then stirring the mixture at a rotation speed of 500 rpm at room temperature for 1 hour.

[0053] Table 1

[0054]

[0055]

[0056] annotation

[0057] 1): Polyvinyl alcohol

[0058] 2): Polyvinylpyrrolidone

[0059] 3): Polyethyloxazoline

[0060] a): Ethylene glycol

[0061] b): Glycerin

[0062] c): Mannitol

[0063] TMAH: Tetramethylammonium hydroxide

[0064] TEAH: Tetraethylammonium hydroxide

[0065] EG: ethylene glycol monoethyl ether

[0066] MG: ethylene glycol monomethyl ether

[0067] EDG: Diethylene glycol monoethyl ether

[0068] MDG: Diethylene glycol monomethyl ether

[0069] MTG: Triethylene glycol monomethyl ether

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Abstract

The invention discloses a cleaning composition which can endow the surface of a substrate with hydrophilicity. The composition includes: 0.0001-5wt% of at least one water-soluble high molecular compound selected from the group composed of polyvinyl alcohol, polyethylene glycol (PEG), cellulose, polyacrylic acid (PAA), polyethyloxazoline and polyvinylpyrrolidone; 0.01-5wt% of a polyol compound; 0.05-10wt% of quaternary ammonium hydroxide; 0.05-40wt% of a glycol ether-based solvent expressed by the following molecular formula; and the balance water.

Description

Technical field [0001] The present invention relates to a cleaning composition, and more particularly, to a cleaning composition for flat panel displays (hereinafter, referred to as "FPDs") such as liquid crystal displays, plasma displays, flexible displays and similar displays. Background technique [0002] FPDs, a typical example of which is liquid crystal displays (LCDs), are manufactured through film formation, exposure, etching, and the like in the same process as semiconductor devices. However, in these processes, various organic or inorganic particles having a size of 1 μm or less adhere to the surface of the substrate, thereby causing contamination of the substrate. When the subsequent process is carried out with particles attached to it, pinholes or pits are formed in the film, and the circuit is broken or bridged, thereby reducing the product yield. Therefore, in order to remove these particles, a cleaning process is implemented, and various cleaning agents have been d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D7/26C11D7/32C11D7/50C11D7/60
Inventor 尹嚆重洪宪杓房淳洪金炳默
Owner DONGWOO FINE CHEM CO LTD
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