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Miniature gas chromatographic column integrated chip with rapid separation function

A micro-gas chromatography and integrated chip technology, which is applied in the field of micro-gas chromatographic column integrated chips, can solve the problems of insensitivity to temperature response, affecting the separation performance of the chromatographic column, and low heating temperature, so as to improve the separation speed and performance, Effect of Rapid Separation Overall Separation Performance, Rapid Temperature Separation Speed, and Separation Performance

Active Publication Date: 2012-09-19
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to speed up the desorption speed of gas sample molecules from the stationary phase of the gas chromatographic column and obtain good separation performance, the traditional gas chromatographic column, whether it is a packed column or a capillary chromatographic column, is placed in a column oven, and the temperature is programmed through the column oven. , therefore, the size is quite large
And existing miniature chromatographic column, miniature heater and miniature temperature sensor are integrated in the bottom of the channel of miniature chromatographic column, there is heating speed slow, heating temperature is not high, and temperature response is insensitive, has directly influenced the separation speed of chromatographic column and separation performance

Method used

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  • Miniature gas chromatographic column integrated chip with rapid separation function
  • Miniature gas chromatographic column integrated chip with rapid separation function
  • Miniature gas chromatographic column integrated chip with rapid separation function

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Experimental program
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Effect test

Embodiment approach 1

[0044] To clean N-type or P-type double-sided polished single crystal silicon wafers, first deposit a layer of 2000 on the silicon substrate 6 Aluminum (aluminum thickness range can be in 1000 -7000 Select) film, then positive resist AZ1500 photolithography and wet etching to remove aluminum, expose the chromatographic channel, and then use deep etching technology to etch to obtain the channel of the micro-chromatographic column, (channel width can be 100-300 microns, length 0.5-6 meters, the depth is 50-150 microns to choose), and then use H 3 PO 4 The mask (aluminum) is removed by wet etching, and the channel 1 of the micro-chromatographic column is obtained after cleaning and drying the channel of the micro-chromatographic column.

Embodiment approach 2

[0046] Clean N-type or P-type double-sided polished single-crystal silicon wafers; first, grow a layer of 4000 by LPCVD or PECVD on the silicon substrate 6 Silicon nitride (the thickness of silicon nitride can be 2000-7000 Select) as insulating layer and mask, then positive resist AZ1500 photolithography, then reactive ion etching to remove silicon nitride, expose the channel of the micro-column, and then use KOH buffer chemical etching to obtain the channel of the micro-column ( The channel width can be selected from 100-300 microns, the length is 0.5-6 meters, and the depth is 50-150 microns). Finally, the channel 1 of the micro-chromatographic column is obtained after cleaning and drying the channel of the micro-chromatographic column.

[0047] The preparation process of the combined micro heater:

[0048] Embodiment of the preparation process of the first micro heater 2a:

[0049] With glass as the substrate 7, firstly, a layer of AZ1500 positive photoresist is coated ...

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Abstract

The invention discloses a miniature gas chromatographic column integrated chip with rapid separation function, and relates to gas chromatographic column integrated chip technology. The integrated chip includes a miniature chromatographic column, combined miniature heaters, and combined miniature temperature sensors. Miniature chromatographic column channels are formed on a silicon substrate by deep etching or chemical etching based on microelectromechanical system (MEMS) technology, then the silicon substrate is hermetically bonded with glass to form the miniature chromatographic column; before bonding, the combined miniature heaters are integrated in the channels and the substrate bottom where the channels are located; and through combined heating, rapid temperature rise is realized, and separation speed and separation performance of the miniature chromatographic column are improved. Meanwhile, the combined miniature temperature sensors are integrated on the upper and the lower surfaces of the channels and in the channels of the miniature chromatographic column, to real-time respond temperature of a gas sample in the miniature chromatographic column, thereby facilitating heating state adjustment of the miniature heaters by an external control circuit, controlling temperature of the miniature chromatographic column, and enabling the miniature chromatographic column to achieve rapid separation, and excellent total separation performance is realized.

Description

technical field [0001] The invention relates to the technical field of gas chromatographic column integrated chips, and is a rapidly separated micro gas chromatographic column integrated chip, which is used for the separation of various mixed gases (including inorganic and organic mixed gases), and is used for harmful gases in submarines, field environment monitoring, Household safety, food safety, cancer diagnosis, mine gas, drug detection and other detection technology fields. Background technique [0002] Gas chromatography (GC) is an extremely effective separation method created by British biochemist Martin ATP et al. It can be used to analyze and separate complex multi-component gas mixtures. In the past 20 years, gas chromatography technology has achieved rapid development in terms of implementation, instrument development and application field expansion. [0003] However, most of the traditional gas chromatography biochemical analysis systems use packed columns or ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/06G01N30/54
Inventor 崔大付孙建海蔡浩原张璐璐陈兴任艳飞李辉
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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