Metal-multilayer insulator-metal capacitor as well as preparation method and integrated circuit thereof
A multi-layer insulator, metal capacitor technology, used in semiconductor/solid-state device manufacturing, circuits, electric solid-state devices, etc., can solve the problems of reducing the performance of metal-insulator-metal MOM capacitors, etc. Effect
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[0034] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.
[0035] Figure 1 to Figure 8 Each step of the method for manufacturing a metal-multilayer insulator-metal capacitor according to an embodiment of the present invention is schematically shown. Such as Figure 1 to Figure 8 As shown, the metal-multilayer insulator-metal capacitor manufacturing method according to the embodiment of the present invention includes:
[0036] The dielectric layer providing step is used to provide the dielectric layer 1; for example, in a specific embodiment, the low-k value dielectric layer 1 can be formed by a deposition process, and the obtained structure is as follows figure 1 shown.
[0037] A capacitor tank forming step for forming a capacitor tank 11 for forming a capacitor in the dielectric layer 1; for examp...
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