Electron density control system of large-area uniform plasmas
A plasma and electron density technology, applied in the field of plasma, can solve the problems of low control precision, short duration, difficult to control, etc., and achieve the effect of improving control precision, improving stability and eliminating errors
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[0026] Refer to attached figure 2 , the large-area uniform plasma electron density control system of the present invention includes: a plasma generation chamber 1, a diagnostic device 2, a power supply device 3, a vacuum device 4 and a control device 5, the diagnostic device 2, the power supply device 3 and the vacuum device 4 are respectively connected to the plasma generation chamber 1, and the control device 5 is respectively connected to the diagnostic device 2, the power supply device 3 and the vacuum device 4, wherein:
[0027] Plasma generation cavity 1 comprises: cylindrical housing 114, observation window 105, hinged window 106, mesh discharge electrode 101, air extraction hole 102, gas filling hole 103, electrode through hole 104, fastening knob 107, hinge 108, sealing Rubber pad 109, insulating glue column 110, electrostatic probe through hole 111, electrostatic probe 112 and through hole 113;
[0028] The diagnostic device 2 includes a measurement unit 201 and a ...
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